Effects of post annealing on removal of defect states in silicon oxynitride films grown by oxidation of silicon substrates nitrided in inductively coupled nitrogen plasma

Ultra thin (5 nm) silicon oxynitride (SiON) films were fabricated at a low temperature using nitrogen plasma generated by an inductively coupled plasma system. Effects of post-metalization annealing (PMA) of Al/SiON/Si MOS structure on the electrical properties of the SiON films were studied and correlations between the charge trapping states and the leakage current were established. Positive charge trapping by interface states generated by plasma damage was characterized by the hysteresis in high-frequency capacitance-voltage (C-V) characteristics. Hysteresis was observed to be completely removed by PMA while interface state density at the Si mid band gap reduced from 2.2×10¹³ to 3.7×10¹¹/eV/cm² and the oxide fixed charge density changed from 3.3×10¹² to −4×10¹¹/cm². The leakage current also decreased significantly, by more than two orders of magnitude, with PMA. The analysis of the leakage current using trap assisted tunneling (TAT) mechanism indicated that with PMA, the trap energy level in the SiON film becomes shallower from 1.3 to 0.7 eV. The positive trapped charges were observed to be annihilated by PMA and the trapping sites became neutral trap centers in the SiON film. This could lead to the reduction in the leakage current component given rise to by TAT.     

Formation and Characterization of Ce3ZrO8 Prepared by the Hydrazine Method

A compound denoted as (Ce_0.75Zr_0.25)O₂ (Ce, ZrO₈) is formed near room temperature from cerium and zirconium nitrates using hydrazine monohydrate. It has a cubic unit cell with a = 0.5342 nm. Characterization of powders heated to various temperatures at 10°C/min demonstrates that the specific surface area does not decrease below 20 mVg until >1000°C.     

Decomposition of chlorofluorocarbons on TiO2ZrO2

The decomposition of chlorofluorocarbons (CFCs) in the presence of water was examined over a variety of solid acid catalysts. The TiO₂ZrO₂ catalyst was found to have the highest activity and longest life among the catalysts examined. The activity of the TiO₂ZrO₂ catalysts depended upon the content of TiO₂. At the contents of TiO₂ from 58 to 90 mole%, the TiO₂ZrO₂ catalysts exhibited high activity, and these catalysts were proven to contain TiZrO₄ crystal. From the study of the XRD peak intensity of the TiZrO₄ crystal, it was highest on the TZ-58 which contained 58 mole% of TiO₂, and decreased with increasing the content of TiO₂. Furthermore, the conversion of CFC113 measured at 673 K was highest at TZ-58, and decreased gradually with increasing TiO₂ content. Therefore, the TiZrO₄ crystal influences the activity of decomposition of CFC113. However, the TiO₂ZrO₂ catalyst was gradually deactivated during the reaction due to the elimination of titanium atoms. A good relationship was found between the activity on TiO₂ZrO₂ catalyst and bond energy of CCl in the compounds of chlorofluorocarbons and hydrochlorocarbons, suggesting that the rate controlling step was the cleavage of CCl bond.     

The Failure of the Strong Pumping Lemma for Multiple Context-Free Languages

Seki et al. (Theor. Comput. Sci. 88(2):191–229, 1991) showed that every m-multiple context-free language L is weakly 2m-iterative in the sense that either L is finite or L contains a subset of the form \(\{ u_{0} w_{1}^{i} u_{1} \cdots w_{2m}^{i} u_{2m} \mid i \in \mathbb {N}\}\) , where w ₁?w _2n ≠ε. Whether every m-multiple context-free language L is 2m-iterative, that is to say, whether all but finitely many elements z of L can be written as z=u ₀ w ₁ u ₁?w _2m u _2m with w ₁?w _2m ≠ε and \(\{ u_{0} w_{1}^{i} u_{1} \cdots w_{2m}^{i} u_{2m} \mid i \in \mathbb {N}\} \subseteq L\) , has been open. We show that there is a 3-multiple context-free language that is not k-iterative for any k.     

Formation, Characterization, and Hot Isostatic Pressing of Cr2O3-Doped ZrO2 (0,3 mol% Y2O3) Prepared by Hydrazine Method

In the ZrO₂-Cr₂O₃ system, metastable t -ZrO₂ solid solutions containing up to 11 mol% Cr₂O₃ crystallize at low temperatures from amorphous materials prepared by the hydrazine method. The lattice parameter c decreases linearly from 0.5149 to 0.5077 nm with increased Cr₂O₃ content, whereas the lattice parameter a is a constant value ( a = 0.5077 nm) regardless of the starting composition. At higher temperatures, transformation (decomposition) of the solid solutions proceeds in the following way: t (ss)→ t (ss) + m + Cr₂O₃→ m + Cr₂O₃. Above 11 mol% Cr₂O₃ addition, c-ZrO₂ phases are formed in the presence of Cr₂O₃. The t -ZrO₂ solid solution powders have been characterized for particle size, shape, and surface area. They consist of very fine particles (15–30 nm) showing thin platelike morphology. Dense ZrO₂(3Y)-Cr₂O₃ composite ceramics (∼99.7% of theoretical) with an average grain size of 0.3 μm have been fabricated by hot isostatic pressing for 2 h at 1400°C and 196 MPa. Their fracture toughness increases with increased Cr₂O₃ content. The highest K _Ic value of 9.5 MPa·;m^1/2 is achieved in the composite ceramics containing 10 mol% Cr₂O₃.     

A novel bistable reflective display using quick‐response liquid powder

Abstract— We have developed new powder materials that exhibit liquid behavior, which can lead to the realization of novel bistable and reflective displays having paper‐white appearance, high contrast, and quick response. Two types of display were demonstrated, one had 160 × 160 array of pixels and the other had 320 × 320 in a 3.1‐in.‐diagonal viewable image size corresponding to 66 and 132 dpi, respectively. These displays were driven by passive‐matrix addressing. The displays showed a reflectivity of more than 41%, a contrast more than 1:10, and a pixel response time of less than 0.2 msec. The seven‐segment display for use in clocks was also demonstrated.     

Contact and friction between catheter and blood vessel

Therapeutic vascular catheterization techniques are sometimes hampered by the frictional forces between the blood vessel and the catheter, when contact points of the vessel are changing and deforming during the movement of the catheter. The goal of the present study was to characterize frictional interactions between the blood vessel wall and the catheter using experimental and numerical analysis. First, the frictional force was measured with an experimental apparatus that uses a ball and flattened porcine aorta to simulate frictional forces between the catheter and the vessel. Second, catheter motion was characterized by two-dimensional numerical calculations based on the experimental results. Experimental analysis demonstrated that slip occurred and that friction coefficient between the vessel and the catheter and the deformation of the specimen were small when the contact between the ball and the aorta occurred at a small angle. The compliance of the specimen in the normal direction obtained by the experiment was by far larger than that calculated according to the Hertzian contact theory. Numerical analysis shows that this difference of the parameter of the vessel, which must be determined accurately in surgical simulator, could affect the trajectory of the catheter.     

Vector graphics depicting marbling flow

We present an efficient framework for generating marbled textures that can be exported into a vector graphics format based on an explicit surface tracking method. The proposed method enables artists to create complex and realistic marbling textures that can be used for design purposes. Our algorithm is unique in that the marbling paint on the surface of water is represented as an enclosed contour and is advected by fluid flow to deform the marbling silhouette. In contrast to previous methods, in which the shape is tracked with a concentration density field in Eulerian grids, our approach facilitates greater complexity that is free from grid resolution and per-pixel computation while retaining real-time performance. To forestall the propagation of large vertices, we adaptively resample the contours, exploiting the curvature and the turbulence of the fluid as criteria. At the convection phase, we parallelly advect contour particles on a Graphics Processing Unit (GPU) in addition to applying volume corrections. Finally, we quickly remove extremely thin lines in shapes to remove dozens of vertices. We performed our method with an interactive prototype to demonstrate the robustness of the proposed method in several scenarios.