The origination and optimization of Si/SiO/sub 2/ interface roughness and its effect on CMOS performance

As CMOS device dimensions scale down to 100 nm and beyond, the interface roughness between Si and SiO/sub 2/ has become critical to device performance and reliability. Si/SiO/sub 2/ interface roughness degrades channel mobility decreasing drive currents. The authors have used atomic force microscopy to study surface roughness in the processing of 0.16 /spl mu/m CMOS integrated circuits. All of the process steps that could potentially affect the interface roughness have been studied. The results show that oxidation is the major contributor to the interface roughness. The rms roughness is found to be linearly dependent on oxide thickness. Transistors with Si/SiO/sub 2/ interface rms roughness that has been reduced from 1.6 to 1.1 /spl Aring/ by reducing oxide thicknesses show improved device drive currents. This technique for interfacial smoothing and device performance improvement has the advantage of being easily implemented in today's technology.     

Hot-water treatment of sol–gel derived SiO2–TiO2 microparticles and application to electrophoretic deposition for thick films

SiO₂–TiO₂ spherical microparticles of about 0.7 μm in diameter were prepared by the sol–gel method. Anatase nanocrystals were formed in the microparticles and their specific surface area was increased after a hot-water treatment at 90 °C. From the changes in the concentration of I₂ photocatalytically generated from KI aqueous solution, the activity of the SiO₂–TiO₂ microparticles was found to increase with increasing the hot-water treatment time. Particulate, thick films were electrophoretically deposited on indium tin oxide (ITO)-coated glass substrates using the anatase nanocrystal-precipitated SiO₂–TiO₂ microparticles. The thickness of the electrophoretically deposited particulate film increased to be approximately 10 μm with an increase in applied voltage. The resultant thick film showed a high photocatalytic activity.     

Sulfated Hyaluronan Binds to Heparanase and Blocks Its Enzymatic and Cellular Actions in Carcinoma Cells

We examined whether sulfated hyaluronan exerts inhibitory effects on enzymatic and biological actions of heparanase, a sole endo-beta-glucuronidase implicated in cancer malignancy and inflammation. Degradation of heparan sulfate by human and mouse heparanase was inhibited by sulfated hyaluronan. In particular, high-sulfated hyaluronan modified with approximately 2.5 sulfate groups per disaccharide unit effectively inhibited the enzymatic activity at a lower concentration than heparin. Human and mouse heparanase bound to immobilized sulfated hyaluronan. Invasion of heparanase-positive colon-26 cells and 4T1 cells under 3D culture conditions was significantly suppressed in the presence of high-sulfated hyaluronan. Heparanase-induced release of CCL2 from colon-26 cells was suppressed in the presence of sulfated hyaluronan via blocking of cell surface binding and subsequent intracellular NF-κB-dependent signaling. The inhibitory effect of sulfated hyaluronan is likely due to competitive binding to the heparanase molecule, which antagonizes the heparanase-substrate interaction. Fragment molecular orbital calculation revealed a strong binding of sulfated hyaluronan tetrasaccharide to the heparanase molecule based on electrostatic interactions, particularly characterized by interactions of (−1)- and (−2)-positioned sulfated sugar residues with basic amino acid residues composing the heparin-binding domain-1 of heparanase. These results propose a relevance for sulfated hyaluronan in the blocking of heparanase-mediated enzymatic and cellular actions.     

Compact Tunable Narrowband Terahertz-Wave Source Based on Difference Frequency Generation Pumped by Dual Fiber Lasers in MgO:LiNbO<Subscript>3</Subscript>

We demonstrate a high-average-power, single longitudinal-mode, and tunable terahertz (THz)-wave source based on difference frequency generation (DFG) in a MgO:LiNbO₃ (MgO:LN) crystal. The waves for DFG are generated using a pair of Yb-doped pulsed fiber lasers with a master oscillator power fiber amplifier configuration. The average power of the THz-wave output reaches 450 μW at 1.07 THz (280 μm) at a linewidth of 7.2 GHz, and the tunability ranges from 0.35 to 1.07 THz under the pulse repetition frequency of 500 kHz. A short burn-in test of the THz wave is also carried out, and the output power stability is within ± 5% of the averaged power without any active stabilizing technique. The combination of MgO:LN-DFG and stable and robust fiber laser sources is highly promising for the development of high-average-power THz-wave sources, particularly in the high transmission sub-THz region. This approach may enable new applications of THz-wave spectroscopy in imaging and remote sensing.     

Characterization of interfacial reaction and chemical bonding features of LaOx/HfO2 stack structure formed on thermally-grown SiO2/Si(1 0 0)

A stack structure consisting of ～1.5 nm-thick LaO_x and ～4.0 nm-thick HfO₂ was formed on thermally grown SiO₂ on Si(1 0 0) by MOCVD using dipivaloymethanato precursors, and the influence of N₂ annealing on interfacial reaction for this stack structure was examined by using X-ray photoelectron spectroscopy and Fourier transform infrared attenuated total reflection. We found that compositional mixing between LaO_x and HfO₂ becomes significant from 600 °C upwards and that interfacial reaction between HfLa_yO_z and SiO₂ proceeds consistently at 1000 °C in N₂ ambience.     

Development of a Cyclogyro-Based Flying Robot With Variable Attack Angle Mechanisms

This paper presents an experimental study on the development of a cyclogyro-based flying robot with a new variable angle of attack mechanism. A cyclogyro is a flying machine supported in the air by power-driven rotors that rotate about a horizontal axis, like the paddle-wheels of a steamboat. Machines of this type have been designed by some companies but there has been no record of any successful flights. Our design starts with a new variable angle of attack mechanism with an eccentric (rotational) point in addition to a rotational point connecting to a motor. The main feature of the mechanism with the eccentric rotational point is the ability to change attack of angles in accordance with the wing positions (as determined by the rotational angles of the cyclogyro) without actuators. The design parameters (wing span, the number of wings, and eccentric distance) of the flying robot are determined through a series of experiments. Experimental results show that the cyclogyro-based flying robot with the new variable angle of attack mechanism is capable of generating sufficient lift force for flying.     

A unified analysis of resonant converters

The general method of analysis for resonant power converters is presented. This analytical method generalizes the idea of state-space-averaging technique to overcome the limitations of the conventional state-space-averaging method. As the result, the characteristics of resonant power converters are clarified so that transfer functions and stability conditions are revealed. In addition, a computer program of analysis based on the proposed method is developed. The program can be applied to various resonant power converters, even when they have parasitic losses and higher-order resonant circuits     

Mechanism of the noise reduction method by superposition ofhigh-frequency current for semiconductor injection lasers

Semiconductor injection lasers sometimes reveal excess noise called the mode hopping noise, which is associated with the mode hopping phenomena among longitudinal modes. The mode hopping phenomena are caused by coupling effects among lasing modes. To reduce this kind of noise superposition of high-frequency (HF) current on the injection current is frequently used. This reduction method is theoretically analyzed based on the mode competition theory and is compared with experimental measurements. It is confirmed that the coupling effect among the longitudinal modes is released with the HF superposition because of enhanced vibration of the injected electron, resulting in reduction of the mode hopping noise     

Separate/joint optimization of error feedback and coordinate transformation for roundoff noise minimization in two-dimensional state-space digital filters

This paper is concerned with the minimization of roundoff noise subject to l/sub 2/-norm dynamic-range scaling constraints in two-dimensional (2-D) state-space digital filters. Two methods are proposed, with the first one using error feedback alone and the second one using joint error feedback and coordinate transformation optimization. In the first method, several techniques for the determination of optimal full-scale, block-diagonal, diagonal, and scalar error-feedback matrices for a given 2-D state-space digital filter are proposed. In the second method, an iterative approach for minimizing the roundoff noise under l/sub 2/-norm dynamic-range scaling constraints is developed by jointly optimizing a scalar error-feedback matrix and a coordinate transformation matrix, which may be regarded as an alternative approach to the conventional method for synthesizing the optimal 2-D filter structure with minimum roundoff noise. An analytical method for the joint optimization of a general error-feedback matrix and a coordinate transformation matrix under the scaling constraints is also proposed. A numerical example is presented to illustrate the utility of the proposed techniques.     

Er3+-doped cladding fibres and their taper componentapplications

A biconical taper amplifier utilizing an Er³⁺-doped cladding fiber is discussed. A maximum gain of 0.6 dB in a 2.4-Gb/s optical transmission experiment was obtained with a taper about 40 mm long. This result shows the potential of a new structure for Er³⁺ -doped coupling and amplifying components