带有热沉结构的全镂空光读出红外焦平面阵列

A substrate-free optical readout focal plane array(FPA) operating in 8-12μm with a heat sink structure (HSS) was fabricated and its performance was tested.The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity.The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively.The heat sink is fabricated successfully by electroplating copper,which provides high thermal capacity and high thermal conductivity,on the frame of substrate-free FPA. The FPA was tested in the optical-readout system,the results show that the response and NETD are 13.6 grey/K(F / # = 0.8) and 588 mK,respectively.