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随着器件特征尺寸的缩小,热载流子带来的器件蜕化效应越来越严重。电荷泵方法可用于表征陷阱电荷的分布。但由于局部阈值电压窄峰的影响,传统电荷泵法在测试陷阱电荷分布时存在误差。本文提出了一种改进型电荷泵测试方法,可用于精确提取纳米尺度器件中陷阱电荷的横向分布。
本文采用0.12微米的SONOS器件来验证这一方法的有效性。通过编程控制,使SONOS器件形成大约50纳米的阈值电压窄峰。采用新方法测试得到的陷阱电荷分布与测试得到的阈值电压有较好的一致性。 相似文献
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In order to overcome the bit-to-bit interference of the traditional multi-level NAND type device,this paper firstly proposes a novel multi-bit non-uniform channel charge trapping memory(NUC-CTM) device with virtual-source NAND-type array architecture,which can effectively restrain the second-bit effect(SBE) and provide 3-bit per cell capability.Owing to the n~- buffer region,the SBE induced threshold voltage window shift can be reduced to less than 400 mV and the minimum threshold voltage window between ... 相似文献
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A new modified method based on the charge pumping technique is proposed and adopted to extract the lateral profiles of oxide charges in an advanced MOSFET.A 0.12μm SONOS device with 50 nm threshold voltage peak is designed and utilized to demonstrate the proposed method.The trapped charge distribution with a narrow peak can be precisely characterized with this method,which shows good consistency with the measured threshold voltage. 相似文献
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