75 GHz 13.92 dBm InP DHBT 共射共基功率放大器

报道了基于InP基双屏质结双板晶体管(DHBT)工艺的四指共射共基75 GHz微波单片集成(MMIC)功率放大器,器件的最高振荡频率fmax为150 GHz.放大器的输出极发射极面积为15μm×4μm.功率放大器在75 GHz时功率增益为12.3 dB,饱和输出功率为13.92 dBm.放大器在72.5 GHz处输入为2 dBm时达到最大输出功率14.53 dBm.整个芯片传输连接采用共面波导结构,芯片面积为1.06 mm×0.75 mm.     

Ka-band IQ vector modulator employing GaAs HBTs

The importance of high-performance,low-cost and millimeter-wave transmitters for digital communications and radar applications is increasing.The design and performance of a Ka-band balanced in-phase and quadrature-phase(I-Q)type vector modulator,using GaAs heterojunction bipolar transistors(HBTs)as switching elements,are presented.The balanced technique is used to remove the parasitics of the HBTs to result in near perfect constellations.Measurements of the monolithic microwave integrated circuit(MMIC)chip with a size of 1.89×2.26 mm~2 demonstrate an amplitude error below 1.5 dB and the phase error within 3°between 26 and 40 GHz except for a singular point at 35.6 GHz.The results show that the technique is suitable for millimeter-wave digital communications.     

栅槽横向宽度对InAlAs/InGaAs HEMTsDC及RF特性的影响

我们制造出了栅长为88 nm的InP基InAlAs/InGaAs 高电子迁移率器件(HEMTs),该器件的频率特性为ft = 100 GHz, fmax = 185 GHz。本文对横向栅槽宽度分别为300 nm, 412 nm, 1070 nm的器件进行了实验。借助能带图的方式,定性分析了横向栅宽的增加会因为表面态和碰撞电离的作用,使得器件直流特性表现出kink效应,并得到减小横向栅槽宽度能减弱kink效应的结论,文中还讨论了横向栅槽宽度通过改变器件寄生电容及其源漏电阻,从而对频率特性产生影响。这些分析对制造出更高性能的HEMT器件有比较重要的意义。     

功率为16.9 dBm增益大于20 dB的InP DHBT W波段功率放大器

A two-stage MMIC power amplifier has been realized by use of a l-μm InP double heterojunction bipolar transistor(DHBT).The cascode structure,low-loss matching networks,and low-parasite cell units enhance the power gain.The optimum load impedance is determined from load-pull simulation.A coplanar waveguide transmission line is adopted for its ease of fabrication.The chip size is 1.5×1.7 mm~2 with the emitter area of 16×1μm×15μm in the output stage.Measurements show that small signal gain is more than 20 dB over 75.5-84.5 GHz and the saturated power is 16.9 dBm @ 79 GHz with gain of 15.2 dB.The high power gain makes it very suitable for medium power amplification.     

W波段InGaAs/InP动态二分频器

采用fT=214 GHz,fmax=193 GHz的InGaAs/InP异质结双极型晶体管工艺,设计了一款基于时钟驱动型反相器的动态二分频器.该分频器工作频段为60 ～ 100 GHz,但由于测试系统上限频率的限制,只能测出62 ～ 83 GHz的工作范围.在-4.2V和-5.2 V的单电源直流偏置下该分频器的功耗分别为596.4 mW、1060.8 mW.此分频器的成功制作对于工作在W波段锁相环的构建有较大的意义.     

一种包含热效应的InP DHBT大信号模型及其Verilog-A实现

A large signal model for InP/InGaAs double heterojunction bipolar transistors including thermal effects has been reported,which demonstrated good agreements of simulations with measurements.On the basis of the previous model in which the double heterojunction effect,current blocking effect and high current effect in current expression are considered,the effect of bandgap narrowing with temperature has been considered in transport current while a formula for model parameters as a function of temperature has been developed.This model is implemented by Verilog-A and embedded in ADS.The proposed model is verified with DC and large signal measurements.     

SDD定义的InP DHBT大信号模型

A self-built accurate and flexible large-signal model based on an analysis of the characteristics of InP double heterojunction bipolar transistors （DHBTs） is implemented as a seven-port symbolically defined device （SDD） in Agilent ADS. The model accounts for most physical phenomena incluuing the self-heating effect, Kirk effect, soft knee effect, base collector capacitance and collector transit time. The validity and the accuracy of the large-signal model are assessed by comparing the simulation with the measurement of DC, multi-bias small signal S parameters for InP DHBTs.     

An 88 nm gate-length In_(0.53)Ga_(0.47)As/In_(0.52)Al_(0.48)As InP-based HEMT with f_(max) of 201 GHz

正An 88 nm gate-length In_(0.53)Ga_(0.47)As/In_(0.52)Al_(0.48)As InP-based high electron mobility transistor (HEMT) was successfully fabricated with a gate width of 2×50μm and source-drain space of 2.4μm.The T-gate was defined by electron beam lithography in a trilayer of PMMA/A1/UⅧ.The exposure dose and the development time were optimized,and followed by an appropriate residual resist removal process.These devices also demonstrated excellent DC and RF characteristics:the extrinsic maximum transconductance,the full channel current, the threshold voltage,the current gain cutoff frequency and the maximum oscillation frequency of the HEMTs were 765 mS/mm,591 mA/mm,-0.5 V,150 GHz and 201 GHz,respectively.The HEMTs are promising for use in millimeter-wave integrated circuits.     

有效跨导为1052 mS/mm的高性能InP基In0.52Al0.48As/In0.53Ga0.47As HEMTs

我们成功研制了栅长为0.15 μm、栅宽为2?50 μm、源漏间距为2 μm 的InP 基In_0.52Al_0.48As/In_0.53Ga_0.47As高电子迁移率器件。室温下,当器件V_DS为1.7 V,V_GS为0.1 V时,其有效跨导达到了1052 mS/mm。传输线方法(TLM)测试显示器件的接触电阻为0.032 Ω.mm,器件欧姆接触电阻率为1.03?10_-7Ω.cm_-2. 正是良好的欧姆接触及其短的源漏间距减小了源电阻,进而使得有效跨导比较大。器件还有比较好的射频特性：当V_DS＝1.5 V, V_GS ＝0.1 V 时,f_T和f_max分别为151 GHz,303 GHz。文章报道的HEMT器件非常适合毫米波段集成电路的研制。     

W-band push–push monolithic frequency doubler in 1-μm InP DHBT technology

A W-band frequency doubler MMIC is designed and fabricated using 1-μm InP DHBT technology. Active balun is employed to transform the single-ended signal into differential output. Push-push configuration loaded with harmonic resonant network is utilized to acquire the second harmonic frequency. A multi-stage differential structure improves the conversion gain and suppresses the fundamental frequency. The MMIC occupies an area of 0.55×0.5 mm2 with 18 DHBTs integrated. Measurements show that the output power is above 5.8 dBm with the suppression of fundamental frequency below -16 dBc and the conversion gain above 4.7 dB over 75-80 GHz.