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该文分析了福建福清闽江调水调节库混凝土池壁裂缝产生的原因,并对裂缝进行检测、评定,采取微型化学灌浆进行处理。 相似文献
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Silicide-block-film effects on drain-extended MOS (DEMOS) transistors were comparatively investigated, by means of different film stack stoichiometric SiO2 and silicon-rich oxide (SRO). The electrical properties of the as-deposited films were evaluated by extracting source/drain series resistance. It was found that the block film plays a role like a field plate, which has significant influence on the electric field beneath. Similar to hot-carrier- injection (HCI) induced degradation for devices, the block film initially charged in fabrication process also strongly affects the device characteristics and limits the safe operating area. 相似文献
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提出了基于多光刻胶有效扩散长度的光学临近效应修正模型校准方法,其考虑了一维和二维图形之间光刻胶有效扩散长度的不同. 该方法的一个重要步骤在于建立起全新的校准流程,使得一维图形和二维图形具有相同的光学参数和不同的光刻胶有效扩散长度. 另外,在该模型校准流程中提出了一种基于可制造性设计理念的交互. 从校准结果的关键尺寸误差及仿真轮廓和扫描电子显微镜图像的对比来看,基于多光刻胶有效扩散长度的光学临近效应修正模型校准方法的输出模型更加精确和稳定. 相似文献
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介绍了一种制作栅介质的新工艺--原位水汽生成工艺.基于Deal-Grove模型提出了原位水汽生成过程中活性氧原子和硅一硅键反应形成硅氧硅键的氧化模型,并通过MOS电容结构对原位水汽生成和炉管湿法氧化所形成的栅氧化膜的电击穿特性进行了研究和分析.测试结果表明原位水汽生成的栅氧化膜相对于炉管湿法氧化有着更为突出的电学性能,这可以认为是由于弱硅一硅键的充分氧化所导致的.表明原位水汽生成在深亚微米集成电路器件制造中具有广阔应用前景. 相似文献
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介绍了一种制作栅介质的新工艺--原位水汽生成工艺.基于Deal-Grove模型提出了原位水汽生成过程中活性氧原子和硅一硅键反应形成硅氧硅键的氧化模型,并通过MOS电容结构对原位水汽生成和炉管湿法氧化所形成的栅氧化膜的电击穿特性进行了研究和分析.测试结果表明原位水汽生成的栅氧化膜相对于炉管湿法氧化有着更为突出的电学性能,这可以认为是由于弱硅一硅键的充分氧化所导致的.表明原位水汽生成在深亚微米集成电路器件制造中具有广阔应用前景. 相似文献
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For thick resist implant layers,such as a high voltage P well and a deep N well,systematic and uncorrectable overlay residues brought about by the tapered resist profiles were found.It was found that the tapered profile is closely related to the pattern density.Potential solutions of the manufacturing problem include hardening the film solidness or balancing the exposure density.In this paper,instead of focusing on the process change methodology,we intend to solve the issue of the overlay metrology error from the perspective of the overlay mark design.Based on the comparison of the overlay performances between the proposed overlay mark and the original design,it is shown that the optimized overlay mark target achieves better performance in terms of profiles,dynamic precision,tool induced shift(TIS),and residues.Furthermore,five types of overlay marks with dummy bars are studied,and a recommendation for the overlay marks is given. 相似文献
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该文介绍柔性挡墙在泉州浦西滞洪区工程中的应用。泉州浦西滞洪区围岸挡墙基础为软弱土层。挡土墙型式选用加筋柔性结构,应用有纺布(机织土工布)加筋技术和无纺布排水反滤技术。取得成功。这种柔性挡墙具有自重轻、抗震性能好、施工简便、造价低廉等优点,在同类工程中具有稚广价值。 相似文献