“Deep approaches to learning” in a project-based nanofabrication graduate course

We describe a graduate-level, laboratory course that is structured as a “master class” in experimental research project planning and execution. Students work in teams to engage in project topics of their choosing, ideally relevant to their own areas of research, that make use of the university's shared fabrication and characterization facilities. After developing their project plans, which includes a schedule, budget, and milestones, students execute them under the guidance of their mentors. The aim of the course is that the students develop deep conceptual knowledge of the practice of experimental science, with regard to: project planning and execution, effective communication and teamwork, technical rigor, and peer review. Because students learn by applying these skills to topics that are personally relevant to them, this course can be described as using on deep approaches to learning.     

Fabrication of Precise Die Edges for Micro-Optical and MEMS Applications

A method for fabricating precise silicon die edges aligned to a precision of 0.5 mum to the features on the front side of the die without damaging these features is described in this paper. A two step die edge fabrication process with die edge defined by silicon DRIE on the front side of the die and edge grinding on the backside of the die was developed. The features on the front-side of the die close to the edge are not mechanically damaged by this technique. Test structure design and fabrication to measure the precision of die edge with respect to the features on the front side is discussed. Die cleaning process using a protective coating deposited prior to the sawing and grinding processes is also presented.