排序方式: 共有1条查询结果,搜索用时 0 毫秒
1
1.
Sagkol H. Sinaga S. Burghartz J.N. Rejaei B. Akhnoukh A. 《Electron Device Letters, IEEE》2005,26(8):541-543
Self-heating effects on integrated suspended and bulk spiral inductors are explored. A dc current is fed through the inductors during measurement to emulate dc and radio frequency power loss on the inductor. A considerable drop in Q by /spl sim/18% at 36.5 mW is observed for suspended coils with 3-/spl mu/m aluminum metallization compared to reference inductors on bulk-Si. Simulations in Ansoft's ePhysics indicate that, due to the thermal isolation of the suspended coil, the power loss from resistive self-heating in the metal has to be transferred outwards through the metal turns. This also results in a thermal time constant. This time constant is measured to be /spl sim/10 ms, meaning that it can affect power circuits operating in pulsed mode. 相似文献
1