Piezoelectrically actuated tunable capacitor

This paper describes the design, fabrication, and characterization of the first MEMS piezoelectric tunable capacitors employing zinc oxide (ZnO) actuation. Relatively simple design rules for the device-structure optimization for largest deflection are shown from simulation results based on theoretical equations. The ZnO-actuated tunable capacitors are accordingly designed and fabricated with both surface and bulk micromachining techniques. Through the surface micromachining process, sacrificial silicon is removed with XeF/sub 2/, and parylene is successfully used as a supporting layer for a piezoelectric unimorph cantilever. For comparison, other two different structures using plasma-enhanced chemical-vapor deposition (PECVD) SiN and SU-8 as supporting layers are also fabricated. Deflection analyses are performed for three specific structures, among which the parylene-supported one is demonstrated to have the largest displacement and most suitable for tunable capacitor application. For bulk-micromachined tunable capacitor, we have implemented a novel design of a large structure driven by a ZnO unimorph, and obtained a tuning ratio of more than 21:1 (0.46 pF-10.02 pF). This is the highest tuning ratio reported to date for parallel-plate tunable capacitors while requiring an applied voltage of only 35 V.     

Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter

This paper presents the design, fabrication, and characterization of a contactless radio frequency (RF) microelectromechanical system (MEMS) switch, composed of two surface-micromachined piezoelectric tunable capacitors and two bonded-wire inductors. The measured insertion loss and power isolation of the fabricated switch are 2.2 and 10.1 dB, respectively, with a capacitance variation of 4:1 over a narrow bandwidth near 2.2 GHz. This novel approach of using inductors eases the deflection requirement for the deformable bridge of the variable capacitor, and allows piezoelectric ZnO film to be used to deflect the capacitor bridge to vary the air gap, thus yielding a contactless RF switch.     

Convergent Smoothing and Segmentation of Noisy Range Data in Multiscale Space

With few exceptions, most of the existing noise reduction and data segmentation algorithms are only suited to image data. Therefore, an adaptive smoothing algorithm, with model-based masks, within a scale space framework is proposed for range data in this paper. This algorithm smoothes range data that conform to predefined, geometric models, while leaving other data points unaffected. The convergence of the algorithm in yielding dominant features is shown based on its compliance with the anisotropic diffusion concept. The weights of the smoothing masks are adaptively calculated according to the Mahalanobis distances between range data and model-based predictions. These behave as the diffusion coefficient in the anisotropic diffusion equation, thus satisfying the requirements of the causality criterion that no new features are introduced from fine to coarse scales. The computational complexity of this algorithm is examined and compared to that of the well-known RANSAC feature extraction algorithm. Unlike RANSAC, it has the advantage that the computational complexity is less affected by increasing the order of the model, and is independent of the number of model outliers. The proposed algorithm can be used to smooth range data in multiscale space by increasing the number of smoothing iterations. Robust, robot-occlusion-invariant features are then easily extracted from the smoothed data by least squares fitting algorithms.     

A novel bit-level color image encryption using improved 1D chaotic map

Multimedia Tools and Applications - This paper introduces new simple and effective improved one-dimension(1D) Logistic map and Sine map made by the output sequences of two same existing 1D chaotic...     

A side-sensitive synthetic coefficient of variation chart

Control charts for monitoring the coefficient of variation (γ) are useful for processes with an inconsistent mean (μ) and a standard deviation (σ) which changes with μ, by monitoring the consistency in the ratio σ over μ. The synthetic-γ chart is one of the charts proposed to monitor γ, and its attractiveness lie in waiting until a second point to fall outside the control limits before a decision is made. However, existing synthetic-γ charts do not differentiate between the points falling outside the upper control limit (UCL) and lower control limit (LCL). Hence, this paper proposes a side-sensitive synthetic-γ chart, where successive nonconforming samples must either fall above the UCL or below the LCL. Formulae to compute the average run length (ARL), the standard deviation of the run length (SDRL) and expected average run length (EARL) are derived using the Markov chain approach, and the algorithms to obtain the optimal charting parameters are proposed. Subsequently, the optimal charting parameters, ARL, SDRL and EARL values for various numerical examples are shown. Comparisons show that the side-sensitive synthetic-γ chart consistently outperforms the existing synthetic-γ chart, especially for small shifts. The proposed chart also consistently outperforms the Shewhart-γ chart, while showing comparable or better performance than the Exponentially Weighted Moving Average (EWMA) chart for most shift sizes, except for very small shifts. Finally, this paper shows the implementation of the proposed chart on an industrial example.     

Determination of Antioxidant Activity and Polyphenols Content in Chips by Raman and IR Spectroscopy

The application of vibrational spectroscopy for the determination of total polyphenols content, antioxidant activity, colour parameters, and fat level in chips originated from yellow-, red- and purple-fleshed potato varieties is reported. Raman, infrared (IR) and near-infrared (NIR) spectra of the laboratory-prepared chips were collected. Combining spectral data with the results of reference analyses, partial least squares regression models were built. To characterise and compare the elaborated models, the relative standard errors of prediction were calculated for calibration and validation sets. In the case of total phenolics quantification by Raman/IR/NIR techniques, these errors (%) amounted to 4.0/7.0/7.1 and 6.4/8.5/8.4 for calibration and validation samples, respectively, whereas they were 4.9/7.7/4.8 and 6.6/8.3/6.8 for antioxidant activity. The obtained results demonstrate that both infrared and Raman spectroscopy can effectively replace commonly used extraction methods. It follows that Raman spectroscopy has the highest potential to be adopted for the online potato-derived product analysis.     

Fine ZnO patterning with controlled sidewall-etch front slope

This paper describes a wet-etching technique that solves the major difficulty of fine patterning a c-axis oriented polycrystalline ZnO film. The technique uses aqueous NH/sub 4/Cl with electrolytically added copper ions and convection flow, and for the first time, allows the ZnO film to be etched 1) with controlled etch rate ratio between the vertical and horizontal etch rates and 2) with controlled etch-front slope. The ratio between the vertical and horizontal etch rates is as high as 20 to 1, while the angle between the sidewall etch-front surface and the substrate surface can be electrically controlled between 73/spl deg/ and 106/spl deg/. Also, ZnO films can now be patterned to fine features (even sub-/spl mu/m level) with a wet etchant. The electroless galvanic etching technique described in this paper produces uniform etching over a large area (larger than 3" in diameter).     

Sequence Specific Label-Free DNA Sensing Using Film-Bulk-Acoustic-Resonators

A label-free biosensor (for detection of DNA sequences) based on film-bulk-acoustic-resonator (FBAR) is presented in this letter. The FBAR's resonant frequency shifts to a lower value when a complementary single-strand DNA sequence is hybridized with a DNA probe sequence on an Au-coated FBAR surface. The sensor is capable of distinguishing a complementary DNA that is mismatched to a probe DNA by a single nucleotide. The label-free, highly sensitive and selective, and real-time detection of DNA sequence could easily be made into an array for combinatory DNA sequencing, and could possibly help geneticists to detect specific DNA sequences accurately and fast, without any expensive optical scanning or imaging.