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A magnetic-field sensor system integrated in CMOS technology with additional processing steps necessary for sensor fabrication is presented. The system contains a magnetoresistive permalloy microbridge acting as a sensor, temperature compensation circuitry, programmable readout electronics, reference voltage bias, and clock generation. It features maximum magnetic flux sensitivity of 70 mV/μT (corresponds to the magnetic-field sensitivity of 88.2 mV/(A/m) at μr=1) and its temperature gain is below 260 ppm/°C in the range between -50°C and +100°C  相似文献   
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