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1.
This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne scheme. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated  相似文献   
2.
We have developed a novel MOSFET that can transfer signals vertically without through‐silicon vias but by using a fully depleted silicon‐on‐insulator (FDSOI) structure with its source region connected to the back electrodes as well as the front ones. A prototype MOSFET fabricated using the backside anisotropic wet etching technique has confirmed that the electrical characteristics measured from the front and the back electrodes are identical. The subthreshold factor S of the prototype was found to be 64.5 mV/decade, suggesting a good switching performance. Since the double‐sided MOSFET has vertical signal‐transfer capability and excellent operating characteristics, it is expected to contribute to developing a More‐than‐Moore type device of three‐dimensional integration such as pixel‐parallel image sensors. © 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.  相似文献   
3.
This paper presents a novel device architecture for optically actuated microelectromechanical systems (MEMS) endoscopes for optical coherence tomography (OCT) measurement. A 10‐mW infrared light beam at a wavelength of 1.5 µm is transferred through the single‐mode fiber to provide a scanning MEMS mirror with the drive voltage (maximum 11 V) by exciting a photovoltaic cell, while also providing with a secondary light beam at a wavelength of 1.3 µm for the OCT measurement. An electrostatic vertical comb‐drive optical scanner (1.5 mm × 2.0 mm × 0.5 mm) has been developed by using the deep reactive ion etching (DRIE) of a silicon‐on‐insulator (SOI) wafer. The design of the scanner module is discussed, along with the experimental results of electrostatic operation. An equivalent circuit model for the optical scanner is developed to explain the behavior of the optically powered actuation mechanism, including the hysteresis loop in the frequency response and the voltage dependence of oscillating angle (mechanical peak ±3.2°/7 V around the resonance frequency of 250 Hz). OCT measurement of a tissue is demonstrated to reconstruct the cross‐sectional image of a fingerprint at a resolution of lateral 40 µm × vertical 8 µm and penetration depth of 2.5 mm. © 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.  相似文献   
4.
In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. [1454].  相似文献   
5.
A feasibility study is carried out on a 1.6 μm continuous-wave modulation laser absorption spectrometer system for measurement of global CO(2)concentration from a satellite. The studies are performed for wavelength selection and both systematic and random error analyses. The systematic error in the differential absorption optical depth (DAOD) is mainly caused by the temperature estimation error, surface pressure estimation error, altitude estimation error, and ON wavelength instability. The systematic errors caused by unwanted backscattering from background aerosols and dust aerosols can be reduced to less than 0.26% by using a modulation frequency of around 200 kHz, when backscatter coefficients of these unwanted backscattering have a simple profile on altitude. The influence of backscattering from cirrus clouds is much larger than that of dust aerosols. The transmission power required to reduce the random error in the DAOD to 0.26% is determined by the signal-to-noise ratio and the carrier-to-noise ratio calculations. For a satellite altitude of 400 km and receiving aperture diameter of 1 m, the required transmission power is approximately 18 W and 70 W when albedo is 0.31 and 0.08, respectively; the total measurement time in this case is 4 s, which corresponds to a horizontal resolution of 28 km.  相似文献   
6.
The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm×7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 μm thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10~50 μm wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 μm (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account. We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper  相似文献   
7.
8.
Two methods for assessing thermal performance were evaluated for four kinds of forced convective heat transfer augmentations. On method uses the first law of thermodynamics, i.e., the heat transfer improvement at (1) constant Reynolds number, (2) constant pressure loss, and (3) constant pumping power. The other method uses the second law of thermodynamics, i.e., the entropy generation. The first method restricts the effective region and the second method supplies the condition for achieving the minimum entropy generation rate. © 1998 Scripta Technica, Heat Trans Jpn Res, 27(2): 142–154, 1998  相似文献   
9.
This study aimed to investigate the associations of the serial changes of serum levels of various growth factors with liver regeneration after hepatectomy in healthy liver donors. Sixteen healthy liver donors who underwent conventional liver resection were included. Serum levels of various growth factors before hepatectomy and on postoperative day (POD) 1, 3, 5 and 7 were measured. Liver volume data calculated by multi-detector computed tomography using workstation. The ratio of remnant liver volume on POD 0 to liver volume before the operation was 51% ± 20%. The ratio of liver volume on POD 14 to liver volume on POD 0 were inversely correlated with remnant liver volume on POD 0 (r = −0.91). The ratio of liver volume on POD 14 to liver volume on POD 0 were significantly correlated with serum hepatocyte growth factor (HGF) levels on POD 1 (r = 0.54), serum leptin levels on POD 1 (r = 0.54), and serum macrophage colony-stimulating factor (M-CSF) levels on POD 5 (r = 0.76) and POD 7 (r = 0.80). These results suggest that early-phase elevation of serum levels of HGF, leptin and M-CSF may be associated with the acceleration of liver regeneration after hepatectomy in humans.  相似文献   
10.
Abstract— A fabrication technique and characteristics of high‐power‐handling microelectromechanical systems (MEMS) optical scanners for laser 3‐D volumetric‐image display application is reported. The MEMS scanner is designed to control the reflection of high‐power YAG‐laser beam by using the optomechanical combination of a dielectric‐film‐coated mirror cube and an electrostatic‐MEMS‐scanner platform. These hybrid‐type MEMS optical scanners have a stroke of about 20° at resonant frequencies of 600 Hz when a 45‐V pulse voltage is applied.  相似文献   
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