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利用胶体二氧化硅在胺的辅助下对硅片进行抛光是微电子工业中的一种典型制造工艺,其动力学过程仍然不清楚。研究了在硅抛光中加入不同浓度乙二胺(EDA)对抛光速率的影响,结果表明EDA浓度提高时,硅的抛光速率逐渐增大,并且在质量分数5%时增加74.5%。为了揭示其中的作用机理,对EDA和Si在水中的电离性质作了分析,对硅片表面在EDA碱性溶液中的接触角以及Si经过EDA溶液浸泡后的表面作了X射线光电子能谱(XPS)测试,进一步采用基于反应力场的分子动力学模拟了动态反应过程。分析表明EDA和硅片表面不仅有强烈的库仑吸附作用,且Si和EDA通过Si-N进一步形成化学键,其中EDA中的N原子与硅表面原子能形成两种结构,使附近的Si-Si和Si-O键极化。基于这些测试,最终解释了硅在含有EDA碱性抛光液中的抛光动力学过程,此作用机制可为硅衬底加工的抛光液研制提供一定的技术指导。 相似文献
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The movement of Cu in a HfO2-based resistive random access memory (RRAM) device is investigated in depth by first-principle calculations. Thermodynamics analysis shows that the dominant motion of Cu tends to be along the [001] orientation with a faster speed. The migration barriers along different routes are compared and reveal that the [001] orientation is the optimal migration route of Cu in HfO2, which is more favorable for Cu transportation. Furthermore, the preferable HfOz growth orientation along [100], corresponding to Cu migration along [001], is also observed. Therefore, it is proposed that the HfO2 material should grow along [100] and the operating voltage should be applied along [001], which will contribute to the improvement of the response speed and the reduction of power consumption of RRAM. 相似文献
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本研究采用金属掺杂的方式调控氧空位导电细丝的电子结构以获得更好的器件性能.计算了HfO2体系中四组氧空位的形成能,得到VO4-VO23-VO34-VO46最易形成的氧空位簇;分波电荷态密度进一步表明在[010]晶向上电荷聚集形成导电通道.另外,研究了Ag、Mg、Ni、Cu、Al、Ta、Ti掺杂对该缺陷体系电子结构的影响... 相似文献
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基于密度泛函理论(DFT)的第一性原理和VASP仿真软件,分析了阻变随机存储器(RRAM)阻变效应的物理机制。对比计算了单斜晶相HfO2中Ag掺杂体系、氧空位缺陷体系和Ag及氧空位缺陷共掺杂复合缺陷体系的能带、态密度、分波电荷态密度面和形成能,结果表明在相同浓度下Ag掺杂体系能形成导电通道,而氧空位缺陷体系不能形成导电通道;共掺杂体系中其阻变机制以Ag传导为主,氧空位缺陷为辅,且其形成能变小,体系更加稳定。计算共掺杂体系的布居数和迁移势垒,得出在氧空位缺陷存在的前提下,Ag—O键长明显增加,Ag离子的迁移势垒变小,电化学性能增强。进一步计算了缺陷间的相互作用能,其值为负,表明缺陷间具有相互缔合作用,体系更加稳定。 相似文献
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运用第一性原理计算研究了HfO2中间隙氧缺陷的特性。对HfO2中不同位置的间隙氧缺陷的形成能进行了计算,找出了最稳定的间隙氧缺陷位置,并对该位置缺陷计算了缺陷能级、态密度(DOS)和电荷俘获能;另外,还计算了间隙氧缺陷之间的距离对HfO2性质的影响。计算结果显示间隙氧缺陷能够同时俘获电子和空穴,具有两性特征;俘获的电荷主要聚集在间隙氧和最近邻氧原子附近;间隙氧之间距离增大会使得缺陷之间由吸引变为排斥,排斥力随距离继续增大而减小,并且缺陷引入的受主能级量子态数显著增加,这有利于空穴隧穿电流增大,可以用来实现存储层电荷的快速擦除。 相似文献
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Based on first principle calculations, a comprehensive study of substitutional oxygen defects in hexagonal silicon nitride (β-Si3N4) has been carried out. Firstly, it is found that substitutional oxygen is most likely to form clusters at three sites in Si3N4 due to the intense attractive interaction between oxygen defects. Then, by using three analytical tools (trap energy, modified Bader analysis and charge density difference), we discuss the trap abilities of the three clusters. The result shows that each kind of cluster at the three specific sites presents very different abilities to trap charge carriers (electrons or holes): two of the three clusters can trap both kinds of charge carriers, confirming their amphoteric property; While the last remaining one is only able to trap hole carriers. Moreover, our studies reveal that the three clusters differ from each other in terms of endurance during the program/erase progress. Taking full account of capturing properties for the three oxygen clusters, including trap ability and endurance, we deem holes rather than electrons to be optimal to act as operational charge carriers for the oxygen defects in Si3N4-based charge trapping memories. 相似文献
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设计了一种适用于DVB-C标准的高频调谐器中的CMOS可变增益放大器.该放大器由指数控制电路、放大电路和共模反馈电路三部分组成,其中指数控制电路是通过构造一个近似的指数函数来实现.仿真结果表明放大器在3.3V供电电压时,核心电路功耗为4.63mW,增益范围0~30dB,频率范围是46~268MHz,噪声系数小于10dB. 相似文献
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