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2.
The hydrogen annealing process has been used to improve surface roughness of the Si-fin in CMOS FinFETs for the first time. Hydrogen annealing was performed after Si-fin etch and before gate oxidation. As a result, increased saturation current with a lowered threshold voltage and a decreased low-frequency noise level over the entire range of drain current have been attained. The low-frequency noise characteristics indicate that the oxide trap density is reduced by a factor of 3 due to annealing. These results suggest that hydrogen annealing is very effective for improving device performance and for attaining a high-quality surface of the etched Si-fin.  相似文献   
3.
In this letter, a concise process technology is proposed for the first time to enable the fabrication of good quality three-dimensional (3-D) suspended radio frequency (RF) micro-inductors on bulk silicon, without utilizing the lithography process on sidewall and trench-bottom patterning. Samples were fabricated to demonstrate the applicability of the proposed process technology.  相似文献   
4.
Conversion of acrylonitrile-based precursors to carbon fibres   总被引:1,自引:0,他引:1  
The progress of stabilization of two compositions of acrylic fibres with various orientations has been followed by a variety of techniques. The thermooxidative treatments for stabilization have been carried out in a continuous process and also in a batch process under free shrinkage, constant length and constant tension conditions. The morphological model of acrylic fibres consists of an alternating sequence of laterally ordered and laterally disordered regions along the fibre direction. This structure is consistent with the observations based on small-angle X-ray scattering of copper- impregnated precursor fibres and thermomechanical response, thermal stress development, calorimetry, wide- and small-angle X-ray scattering and sonic modu-lus measured at different extents of stabilization. Lateral as well as orientational order in these fibres can be increased markedly through a high-temperature deformation process prior to stabilization. An increase in perfection and extent of order is observed in the early stages of stabilization. There is also a simultaneous decrease in the orientation of the disordered phase at this stage and the extent of this decrease depends on the axial constraints imposed on the fibre. Little difference in the rate of stabilization is observed as measured by density or oxygen uptake for fibres with different extents of orientation, lateral order or restraint. Fibres containing itaconic add, a stabilization catalyst did show an increased rate of stabilization. Inferences have been drawn regarding additional research pertaining to achieving high order in precursor fibres, minimizing orientational relaxation during oxidative stabilization, and the techniques for monitoring the extents of the stabilization treatment and the changes in relevant morphological parameters.  相似文献   
5.
Aluminium-neodymium oxide-aluminium thin film capacitors have been prepared by thermal evaporation and the d.c. conduction properties of these films have been studied. The thicknesses of the films have been determined by a multiple beam interferometer. The current-voltage power-law dependence showed that the conduction in these films is space-charge limited. The linear dependence of the current density on the square root of the applied field confirmed the exponential trap distribution. The trap density has been found to be of the order of 1026 m–3. It has also been observed that the Schottky type of conduction is predominant in the high-field region and the height of the Schottky barrier has been determined. It is seen that the conduction mechanism is an activated process with the activation energy decreasing with increasing field.  相似文献   
6.
Swoop: A Web Ontology Editing Browser   总被引:2,自引:0,他引:2  
In this paper, we describe Swoop, a hypermedia inspired Ontology Browser and Editor based on OWL, the recently standardized Web-oriented ontology language. After discussing the design rationale and architecture of Swoop, we focus mainly on its features, using illustrative examples to highlight its use. We demonstrate that with its Web-metaphor, adherence to OWL recommendations and key unique features, such as Collaborative Annotation using Annotea, Swoop acts as a useful and efficient Web Ontology development tool. We conclude with a list of future plans for Swoop, that should further increase its overall appeal and accessibility.  相似文献   
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8.
A digital method for generating precisely controlled sine-squared shaped video sync pulses of sixteen different wave shapes is reported. The principle involved in the technique is to store 16 sample values of the desired sine-squared shaped signal in programmable read-only memory (PROM) and to release these digital data sequentially to a digital-to-analog converter at a desired speed to produce the sine-squared shaped waveform. The application of this method is discussed  相似文献   
9.
In real world, the automatic detection of liver disease is a challenging problem among medical practitioners. The intent of this work is to propose an intelligent hybrid approach for the diagnosis of hepatitis disease. The diagnosis is performed with the combination of k‐means clustering and improved ensemble‐driven learning. To avoid clinical experience and to reduce the evaluation time, ensemble learning is deployed, which constructs a set of hypotheses by using multiple learners to solve a liver disease problem. The performance analysis of the proposed integrated hybrid system is compared in terms of accuracy, true positive rate, precision, f‐measure, kappa statistic, mean absolute error, and root mean squared error. Simulation results showed that the enhanced k‐means clustering and improved ensemble learning with enhanced adaptive boosting, bagged decision tree, and J48 decision tree‐based intelligent hybrid approach achieved better prediction outcomes than other existing individual and integrated methods.  相似文献   
10.
Phan  Alex  Truong  Phuong  Schade  Christoph  Vasan  Aditya  Friend  James  Talke  Frank E. 《Microsystem Technologies》2021,27(6):2473-2479
Microsystem Technologies - “Zero drift” behavior of an optical intraocular pressure sensor is studied using an analytical model based on the deflection of a circular membrane. Results...  相似文献   
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