Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Identification of SYS1 as a Host Factor Required for Shiga Toxin-Mediated Cytotoxicity in Vero Cells

Shiga toxin (STx) or Vero toxin is a virulence factor produced by enterohemorrhagic Escherichia coli. The toxin binds to the glycosphingolipid globotriaosylceramide (Gb3) for its entry, and causes cell death by inhibiting ribosome function. Previously, we performed a loss-of-function screen in HeLa cells using a human CRISPR knockout (KO) library and identified various host genes required for STx-induced cell death. To determine whether this library targeted to the human genome is applicable to non-human primate cells and to identify previously unrecognized factors crucial for STx-induced cell death, we herein performed a similar screen in the African green monkey kidney-derived Vero C1008 subline. Many genes relevant to metabolic enzymes and membrane trafficking were enriched, although the number of enriched genes was less than that obtained in the screening for HeLa cells. Of note, several genes that had not been enriched in the previous screening were enriched: one of these genes was SYS1, which encodes a multi-spanning membrane protein in the Golgi apparatus. In SYS1 KO Vero cells, expression of Gb3 and sphingomyelin was decreased, while that of glucosylceramide and lactosylceramide was increased. In addition, loss of SYS1 inhibited the biosynthesis of protein glycans, deformed the Golgi apparatus, and perturbed the localization of trans-Golgi network protein (TGN) 46. These results indicate that the human CRISPR KO library is applicable to Vero cell lines, and SYS1 has a widespread effect on glycan biosynthesis via regulation of intra-Golgi and endosome–TGN retrograde transports.     

Two complementary operations inspired by the DNA hairpin formation: Completion and reduction

We consider two complementary operations: Hairpin completion introduced in [D. Cheptea, C. Martin-Vide, V. Mitrana, A new operation on words suggested by DNA biochemistry: Hairpin completion, in: Proc. Transgressive Computing, 2006, pp. 216–228] with motivations coming from DNA biochemistry and hairpin reduction as the inverse operation of the hairpin completion. Both operations are viewed here as formal operations on words and languages. We settle the closure properties of the classes of regular and linear context-free languages under hairpin completion in comparison with hairpin reduction. While the class of linear context-free languages is exactly the weak-code image of the class of the hairpin completion of regular languages, rather surprisingly, the weak-code image of the class of the hairpin completion of linear context-free languages is a class of mildly context-sensitive languages. The closure properties with respect to the hairpin reduction of some time and space complexity classes are also studied. We show that the factors found in the general cases are not necessary for regular and context-free languages. This part of the paper completes the results given in the earlier paper, where a similar investigation was made for hairpin completion. Finally, we briefly discuss the iterated variants of these operations.     

On the computational power of insertion-deletion systems

Gene insertion and deletion are basic phenomena found in DNA processing or RNA editing in molecular biology. The genetic mechanism and development based on these evolutionary transformations have been formulated as a formal system with two operations of insertion and deletion, called insertion-deletion systems (Kari and Thierrin, 1996; Kari et al., 1997).We investigate the generative power of insertion-deletion systems (InsDel systems), and show that the family INS ¹ ₁ DEL ¹ ₁ is equal to the family of recursively enumerable languages. This gives a positive answer to an open problem posed in Kari et al. (1997) where it was conjectured contrary. This revised version was published online in June 2006 with corrections to the Cover Date.     

A simple approach to observe non-conductive hydrated materials with FE-SEM: Case study on porous hydroxyapatite green bodies

The purpose of this study is to develop a simple method to observe the surface morphology of non-conductive material in its hydrated condition. Here porous hydroxyapatite (HAp) green body prepared by gelcasting process was considered as a case study, and, the resultant body was subsequently treated with hydrophilic ionic liquid (IL). The surface morphology and the pore structure of the IL-treated porous HAp green body were successfully observed even in hydrated condition without any charging using field emission scanning electron microscope (FE-SEM). Results showed that the pore diameter from 300 to 600 μm in as-prepared green body was reduced to 100–300 μm in the sample sintered at 1000 °C. Raman results showed that the IL forms weak hydrogen bond with water molecules within the sample and, that prevents from drying in vacuum condition. In addition, the IL acts as a conducting media for HAp ceramics to be observed under FE-SEM.     

An outcome of nuclear safety research in JAERI: case study for LOCA

An outcome of nuclear safety research (NSR) done by JAERI (Japan Atomic Energy Research Institute) was case studied by the bibliometric method. (1) For LOCA (loss-of-coolant accident) a domestic share of JAERI in monoclinic research paper was 63% at the past (20) 1978–1982 but was decreased to 40% at the present 1998–2002. For co-authored papers a domestic share between JAERI and PS (public sectors) was zero at past (20) but increased to 4% at the present. Research cooperation is active between Tokyo University and JAERI or between JAERI and Nagoya University. (2) It is revealed that LOCA outputs born by NSR-JAERI reflected partly to those of the Safety Licensing Guidelines, however, a share of NSR-JAERI could not determined due to the lack of necessary information in the Guideline.     

Accumulation of Arsenic and Copper by Bryophytes Growing in an Aquatic Environment near Copper Mine Tailings

Bryophytes with high As accumulation affinity were identified in the aquatic environment. We surveyed a stream near copper mine tailings and then conducted laboratory experiments to confirm As accumulation in the bryophytes with high As affinity. We found that a moss, Scopelophila cataractae, accumulates As in addition to Cu in aquatic environments and confirmed it in laboratory experiments. The highest value for As in S. cataractae from the field survey was 1300 mg/kg dry weight at relatively low As concentrations in the stream water (0.005 mg/L). In addition, Brachythecium plumosum and Rhynchostegium riparioides may also be useful bryophytes for accumulation of Cu and As, though the mechanisms of As accumulation might differ between these two bryophytes and S. cataractae.     

A pregnancy-specific glycoprotein is expressed in the brain and serves as a receptor for mouse hepatitis virus

Mouse hepatitis virus (MHV), a murine coronavirus known to cause encephalitis and demyelination, uses murine homologues of carcinoembryonic antigens as receptors. However, the expression of these receptors is extremely low in the brain. By low-stringency screening of a mouse brain cDNA library, we have identified a member of the pregnancy-specific glycoprotein (PSG) subgroup of the carcinoembryonic antigen gene family. Unlike other PSG that are expressed in the placenta, it is expressed predominantly in the brain. Transfection of the cDNA into COS-7 cells, which lack a functional MHV receptor, conferred susceptibility to infection by some MHV strains, including A59, MHV-2, and MHV-3, but not JHM. Thus, this is a virus strain-specific receptor. The detection of multiple receptors for MHV suggests the flexibility of this virus in receptor utilization. The identification of this virus in receptor utilization. The identification of a PSG predominantly expressed in the brain also expands the potential functions of these molecules.     

Failure-analysis-based test chip design for quick yield improvement

A new design approach for a test chip developed to shorten the debugging cycle time in fabrication is described. This approach meets the requirements for failure analysis as well as parametric and statistical analyses. Particular attention is devoted to accurate defect density estimation and to locating individual defects. This is done by designing test structures suitable for both electrical measurements and failure analysis. A specially designed test chip, named YTEG, is used to evaluate 0.5-μm CMOS process technologies, and confirms the effectiveness of the chip.