Fabrication of Superconducting MgB2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates

We fabricated superconducting MgB₂ thin films on (001) MgO substrates by magnetron rf and dc co-sputtering on heated substrates. We annealed the samples ex-situ and in-situ at temperatures between 450 ^°C and 750 ^°C. The substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB₂ superconducting thin films. We achieved a critical onset temperature of up to 27.1 K for the ex-situ and 25.6 K for the in-situ annealed samples at a film thickness of 30 nm. The samples shows an out of plane (0002)-Peak which was determined by x-ray diffraction.