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A. T. Clare P. R. Chalker S. Davies C. J. Sutcliffe S. Tsopanos 《Journal of Materials Science》2008,43(9):3197-3202
A selective laser sintering process has been used to consolidate electro-ceramic thin films on silicon substrates. Methods
of forming pre-positioned layers of barium titanate were investigated by spin-coating the feedstock powder mixed with a commercial
polymer photo-resist. The ceramic–polymer composite was deposited directly onto a nickel film which was evaporated onto a
silicon substrate, pre-oxidised to form an electrically insulating layer. A range of laser processing parameters was identified
in which consolidated barium titanate layers could be formed. The laser power was found to be more influential in forming
sintered microstructures than laser exposure time. The microstructure of barium titanate films is sensitive to the SLS laser-processing
conditions, with the optimum laser powers for the processing of the BaTiO3–polymer found to be in the range 17–20 W. This article highlights the possibility of using ‘direct write’ techniques to produce
piezoelectric materials upon silicon substrates. 相似文献
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Adam T. Clare Paul R. Chalker Sean Davies Christopher J. Sutcliffe Sozos Tsopanos 《International Journal of Mechanics and Materials in Design》2008,4(2):181-187
Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi micro-electro-mechanical components.
Cantilever beams manufactured in this way have been two-way trained and actuated by ohmic heating demonstrating the suitability
of the process for applications in micro-electromechanical technologies. The influence of laser dwell time and raster pitch
on the density of NiTi shape memory alloy parts and the resolvable feature sizes achievable are discussed. The shape memory
effect properties of solid parts produced by selective laser melting are also reported in contrast to those properties exhibited
by NiTi alloys resulting from other processes. 相似文献
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