Optimization of Selective Epitaxial Growth of Silicon in LPCVD

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high‐density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas‐phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E‐beam patterns, we evaluated and controlled selectivity loss and nonuniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.     

Reduction of sodium-accelerated oxidation of silicon nitride ceramics by aluminium implantation

Norton NBD 200 silicon nitride ceramics were implanted with sodium to a dose of 7.0×10¹⁵cm^-2 at 72 keV (1 at% peak sodium content at 100 nm). The sodium-implanted samples were further implanted with aluminium to 7.3×10¹⁵cm^-2 at 87 keV (1 at% peak aluminium content at 100 nm). The implanted and unimplanted samples were oxidized in 1 atm dry oxygen at 1100 and 1300°C for 2–6 h. Profilometry and scanning electron microscopy measurements indicated that sodium implantation led to up to a two-fold increase in the oxidation rate of silicon nitride. The sodium effect was effectively neutralized when aluminium was co-implanted. The opposite effects of sodium and aluminium on the oxidation resistance of silicon nitride can be attributed to their different roles in modifying the structure and properties of the oxide formed. This revised version was published online in November 2006 with corrections to the Cover Date.     

Current IMT-2000 R&D status and views in Korea

In this article Korean development of IMT-2000 is considered. It includes the second-generation digital mobile communications, R&D and standardization activities related to IMT-2000, and the authors' perspectives on IMT-2000 in Korea. In Korea, there are many activities for development of IMT-2000 radio transmission technologies, and the results of these activities will be the submission of technologies to the ITU. However, the Korean telecommunications standardization body (TTA) will make every effort to make a common global standard for IMT-2000. Therefore, the TTA will make a domestic standard for IMT-2000 after the ITU finalizes the related Recommendations. It seems to the authors that difficulties in harmonization in the TTA are very similar to difficulties in harmonization worldwide. The only way of reaching the harmonization of IMT-2000 in Korea is that the key players should have the view from the end users' seat     

Ice-slurry production using direct contact heat transfer

An ice slurry generation system was developed using direct contact heat transfer between water and the coolant, Fluroinert FC-84. The location of the coolant nozzle is an important design consideration to avoid clogging due to freezing of water. An ice fraction of up to about 40 percent was obtained with the nozzle located at the bottom of the ice slurry tank and the jet directed upwards into the water. Two simplified model were developed to extract the heat transfer coefficient between the coolant drops and the water. The first model requires as input the average drop diameter and the residence time while the second model uses the measured drop diameter distribution. The estimated heat transfer coefficients are much smaller than those computed using single-sphere correlations.     

An Optimized Content-Aware Authentication Scheme for Streaming JPEG-2000 Images Over Lossy Networks

This paper proposes an optimized content-aware authentication scheme for JPEG-2000 streams over lossy networks, where a received packet is consumed only when it is both decodable and authenticated. In a JPEG-2000 codestream, some packets are more important than others in terms of coding dependency and image quality. This naturally motivates allocating more redundant authentication information for the more important packets in order to maximize their probability of authentication and thereby minimize the distortion at the receiver. Towards this goal, with the awareness of its corresponding image content, we formulate an optimization framework to compute an authentication graph to maximize the expected media quality at the receiver, given specific authentication overhead and knowledge of network loss rate. System analysis and experimental results demonstrate that the proposed scheme achieves our design goal in that the rate-distortion (R-D) curve of the authenticated image is very close to the R-D curve when no authentication is required     

An effective rhodium catalyst system on the synthesis of acetic acid from methyl formate

Rh/Lil/SnR₄ is an effective catalyst system for the conversion of methyl formate to acetic acid under carbon monoxide pressure. The effects of solvent and initial CO partial pressure on the turnover rate of the reaction were investigated. The possibility of replacing some of the iodide promoters by tin compounds has been probed.     

Temporal order and functional analysis of mutations within the Fli-1 and p53 genes during the erythroleukemias induced by F-MuLV

The erythroleukemias induced by Friend murine leukemia virus (F-MuLV) result from the accumulation of a number of genetic changes, including activation of the Fli-1 proto-oncogene and inactivation of the p53 tumor suppressor gene. We have determined the temporal order of mutation of the genes involved in this multistage malignancy, by serial in vivo transplantation of F-MuLV induced primary erythroleukemias into syngenic Balb/c mice. These primary tumors are capable of growing when transplanted into syngenic mice, but die after several days of in vitro culture. From the transplanted tumors grown in syngenic mice, erythropoietin-dependent cell lines were established in culture that are clonally related to cells in the primary tumors. We show that retroviral insertional activation of the Fli-1 ets family member is the first detectable genetic event in F-MuLV induced primary erythroleukemias. Mutations in the p53 gene were observed in the Epo-dependent cell lines but not in the transplanted erythroleukemias used to establish these cell lines in culture. These data suggest that activation of Fli-1 plays an important role in the early stages of F-MuLV-induced leukemia, perhaps by altering the self-renewal probabilities of erythroid progenitor cells and that p53 mutations immortalize these cells, enabling them to grow in vitro in the presence of Epo.     

Comparison of Markov model and fault tree approach in determining initiating event frequency for systems with two train configurations

This study explores the use of Markov models in some areas of systems analysis in which time evolution of the system may be a significant factor in influencing the system reliability or availability. Comparisons are made between the Markov models and the time-averaged fault tree models for determining support system failure initiating event frequency in a nuclear power plant, for both power and shutdown conditions. Factors affecting consistency between the fault tree approach and the Markov model approach are studied for systems with common two train configurations. A correlation is developed to estimate the ratio between initiator frequencies through both approaches for a two parallel component system. Insights are developed as to when time averaged and simplified fault tree models support a good approximation to the more rigorous time-dependent Markov models.