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Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD 总被引:3,自引:0,他引:3
In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radiofrequency plasma chemical vapor deposition (RF-PCVD). In this paper, the configuration and computation of external magnetic field B are introduced. The restriction effect of magnetic field B on the charged particles and the effect of magnetic field B on the primary parameters-nonindependent power Pf and self-bias Uz were also studied. The mechanism of how magnetic field B affects self-bias Uz was analyzed. 相似文献
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真空阴极电弧沉积TiB2薄膜的组织结构及其摩擦学性能的研究 总被引:2,自引:0,他引:2
用TiB2作阴极靶,采用优化的真空阴极电弧沉积工艺制备的TiB2薄膜是由TiB2,Ti2B5,TiB和Ti组成的多相结构。薄膜的摩擦磨损试验表明:TiB2薄膜的摩擦系数为0.139,膜层寿命超过60min,是TiN和(Ti,Al)N膜层的2倍。 相似文献
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掺钨类金刚石膜的制备与性能研究 总被引:4,自引:0,他引:4
采用无灯丝长条离子源结合非平衡磁控溅射的方法,在不同基体上制备了面积较大、光滑、均匀的掺钨类金刚石(W-DLC)膜层,用SEM、Raman、XPS、XRD、硬度计、划痕仪、摩擦磨损试验机等手段分析和研究了膜层的形貌、结构及部分性能.结果表明:膜/基硬度高,W—DLC/Si为Hv0.02515=3577;膜/基结合力在45-75N之间;摩擦系数小,抗磨损性能良好. 相似文献
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LIN Song-sheng HOU Hui-jun ZHU Xia-gao YUAN Zhen-hai DAI Da-huang LI Hong-wu 《材料研究与应用》2005,(3):502-506
In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results. 相似文献
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采用丙酮、甲苯和硝酸3种不同溶剂对废轮胎热解炭黑(CBp)进行处理,将处理后的CBp应用到丁苯橡胶(SBR)中,考察其对SBR的补强效果。结果表明:CBp经丙酮抽提处理和甲苯索氏抽提处理后,附聚体变得疏松,原生粒子轮廓更加清晰,微孔和介孔体积增大;硝酸酸洗处理CBp经甲苯索氏抽提后比表面积大幅提高。将CBp丙酮抽提处理或硝酸酸洗脱灰处理后填充到SBR中,相应硫化胶的300%定伸应力、拉伸强度、撕裂强度和耐磨性能均有所提高。丙酮抽提处理CBp和酸洗处理CBp替代炭黑N660应用到SBR中,相应硫化胶的抗湿滑性能变化不大,滚动阻力下降。 相似文献
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采用磁约束增强射频辉光放电等离子体辅助化学气相沉积法(RF-PCVD)低温沉积出无色透明的类金刚石保护膜(DLC),主要研究了炉压P0、射频功率Pf、自生负偏压Uz、磁感应强度B、电极间距d、反应气体、镀膜时间t等工艺参数对成膜的影响.试验结果表明,外加磁场B制约了带电粒子逃逸出电极空间,提高了反应气体的离化率及等离子体浓度和活性,并使非独立变量Pf和Uz成为独立变量,有利于工艺调节.当极间距大时,需适当提高Pf,Uz和C-H流量才可得到无色、较硬的DLC膜.在比功率密度大于0.009 W·cm-2·Pa-1、C-H浓度即体积分数0.9%~1.4%及膜厚小于90nm的条件下,可沉积出无色透明、硬度较高的DLC膜. 相似文献
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采用中频反应磁控溅射、离子束辅助方法沉积CrTiAlCN多元硬质薄膜,利用扫描电镜、俄歇电子谱、透射电镜及X射线衍射等技术对膜层的过渡层、界面及微观结构进行研究.结果表明:沉积制备的膜层为多层梯度过渡结构,成分深度分布及相结构分析证实,所制备的多元多层梯度膜与所设计的基体/Cr/CrN/CrTiAlN/ CrTiAlCN结构相吻合;在梯度过渡中,不同层之间界面体现为渐变过渡过程;沉积制备的多元多层梯度膜硬度高达26.31 GPa,膜/基结合力大于80 N,摩擦因数低至0.113,力学性能优良. 相似文献