PLANAR COPPER PLATING AND ELECTROPOLISHING TECHNIQUES

Electrochemical mechanical deposition (ECMD) is a novel technique that has the ability to deposit planar conductive films on non planar substrate surfaces. This technique involves electrochemical deposition (ECD) while simultaneously polishing the substrate surface. Preferential deposition of the conductor into the cavities on the substrate surface may be achieved through two different mechanisms. The first mechanism is more mechanical in nature and it involves material removal from the top surface. The second mechanism is more chemical in nature, and it involves enhancing the deposition into the cavities where mechanical sweeping does not reach and reducing deposition onto surfaces that are swept. In this study we demonstrate that in an ECMD process, low-pressure mechanical sweeping of the wafer surface during copper plating can establish a differential in the activity of the organic accelerator species between the surface and the cavity regions of the substrate and thus give rise to bottom-up filling in even the lowest aspect-ratio cavities. Planar layers obtained by the ECMD technique have been successfully employed in an electrochemical polishing technique for stress-free removal of Cu.     

Effect of the Mn/Fe Ratio on the Microstructure and Magnetic Properties in the Powder Form (Fe<Subscript>1−<Emphasis Type="Italic">x</Emphasis></Subscript>Mn<Subscript><Emphasis Type="Italic">x</Emphasis></Subscript>)<Subscript>2</Subscript>P System

The structure, morphology, and magnetic properties of the mechanically alloyed iron manganese phosphides (Fe_1?x Mn _x )₂P with 0.15 ≤ x ≤ 0.75 (Mn/Fe ratio = 0.17, 0.33, 0.66, and 3) have been studied by means of X-ray diffraction, scanning electron microscopy coupled with energy-dispersive X-ray spectrometry, and BS1 and BS2 magnetometry. The powder form (Fe_1?x Mn _x )₂P compounds exhibit multiphase structures that contain Fe(Mn)-type solid solution and Fe₂P-type, Mn₂P-type, Fe₃P-type, and MnP/FeP-type phosphides. The magnetization versus temperature reveals the existence of multiple magnetic phase transitions. The saturation magnetization, coercivity, and squarness M _r/M _s ratio values are discussed as a function of both the Mn content and the temperature. From the approach to saturation magnetization studies, several fundamental magnetic parameters were extracted. The local magnetic anisotropy constant K ₁ was determined.     

Comparison of Fe-Ni based alloys prepared by ball milling and rapid solidification

Mechanical alloying (MA) and rapid solidification (RS) are two important routes to obtain amorphous alloys. An Fe-Ni based metal-metalloid alloy (Fe₅₀Ni₃₀P₁₄Si₆) prepared by these two different processing routes was studied by differential scanning calorimetry, scanning electron microscopy with microanalysis, inductive coupled plasma, X-ray diffraction (XRD) and transmission Mössbauer spectroscopy (TMS). The results were compared with that obtained from other Fe-Ni based alloys of similar compositions. The structural analyses show that the materials obtained by mechanical alloying are not completely disordered after 40 h of milling whereas fully amorphous alloys were obtained by rapid solidification. TMS analyses show that, independent of the composition, after milling for 40 h, about 7% of the Fe remains unreacted. Furthermore, the thermal stability of mechanically alloyed samples is lower than that of the analogous material prepared by rapid solidification. In the MA alloys, a broad exothermic process associated to structural relaxation begins at low temperature. XRD patterns of crystallized alloys indicate that the crystallization products are bcc(Fe,Ni), fcc(Ni,Fe), and (Fe,Ni)-phosphides and -silicides.     

Improving the methodology for coating defects detection

A vacuum impregnation procedure for examining the microstructure of thermal spray coatings has been evaluated using a low-viscosity fluorescent resin. The use of confocal laser scanning microscopy for examining the microstructure allows three-dimensional image reconstruction of the sample. Relationships between defects (i.e., porosity or micro/macrocracking) and coating properties can be established more accurately with the proposed methodology because it enables quantitative analysis.     

Bubbly Jet Impingement in Different Liquids

The impingement of bubbly jets in distilled water and ethanol has been experimentally studied on ground. An experimental apparatus for the study of jet impingement on ground and in microgravity has been designed. The opposed-jet configuration with changeable orientation is used in order to study which is the better disposition to achieve an efficient mixing process. The impact angle between jets that can be changed from 0° (frontal collision) up to 90° (perpendicular collision). The impinging jets are introduced into a test tank full of liquid by means of two bubble injectors. The bubble generation method, insensitive to gravity level for low Bond numbers, is based on the creation of a slug flow inside a T-junction of capillary tubes of 0.7 mm of diameter. Bubble velocities at the injector outlet and generation frequencies can be controlled by changing gas and liquid flow rates. Individual bubble properties and coalescence events, as well as the whole jet structure are analyzed from the images recorded by a high speed camera. Bubble velocities are compared with the velocity field of a single-phase jet. Rate of coalescence between bubbles is found higher in ethanol than in water, creating a higher dispersion in bubble sizes.     

Inhomogeneity of rolling texture in fcc metals

The cold rolling of metal sheets and strips results in the formation of an inhomogeneous texture. The type and sharpness of texture in layers and the degree of inhomogeneity depend on the friction between rolls and the material and the geometry of the rolling gap. Contrary to the opinion of several authors, it is shown that the inhomogeneity of texture appears not only in the case of small values of thel/h ratio (l/h characterizes the geometry of the rolling gap) but also in the case of large values whenl/h > 5. In the first case shear texture forms in the intermediate layers of the rolled sheet while in the second, in its outer layers. The results of experiments carried out on aluminum, silver and 70/30 brass clearly show that the sensitivity of metals and alloys to the formation of an inhomogeneous texture is caused by their flow characteristics: yield strength (Y) and the work hardening exponent (m). High values ofY andm will tend to hinder the shear deformation, and consequently they will hinder the occurrence of inhomogeneity.     

Flexible and light weight copper indium diselenide solar cells on polyimide substrates

Thin film flexible CuInSe₂ (CIS) solar cells have been fabricated for the first time on light-weight polymeric substrates. Evaporated Cu---In alloy precursors were selenized in H₂Se atmosphere at around 400°C to grow the CIS absorber layers. Low temperature techniques which are compatible with the polymeric substrates were used to deposit the window layers of CdS and ZnO. The demonstrated active area conversion efficiency of 9.3% makes this light-weight device very attractive for many terrestrial and space power generation applications where high specific power and mechanical flexibility are needed.