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排序方式: 共有94条查询结果,搜索用时 15 毫秒
1.
Verghese S. Hauser J.R. Wortman J.J. Kerns S.E. 《Electron Devices, IEEE Transactions on》1989,36(7):1311-1317
An analysis of forward I -V characteristics for Al Schottky contacts to polycrystalline thin films is presented. Experimental results for lateral structures with various n- doping levels show the expected twofold exponential characteristics representing a transition from electrode-limited to bulk-limited conduction. At higher doping levels the bulk-limited characteristic is not a perfect exponential. The thermionic emission theory has been modified to include crystallite resistivity between grain boundaries and successfully matches experimental data 相似文献
2.
S. P. Ashburn M. C. Öztürk J. J. Wortman G. Harris J. Honeycutt D. M. Maher 《Journal of Electronic Materials》1992,21(1):81-86
Titanium and cobalt germanides have been formed on Si (100) substrates using rapid thermal processing. Germanium was deposited
by rapid thermal chemical vapor deposition prior to metal evaporation. Solid phase reactions were then performed using rapid
thermal annealing in either Ar or N2 ambients. Germanide formation has been found to occur in a manner similar to the formation of corresponding silicides. The
sheet resistance was found to be dependent on annealing ambient (Ar or N2) for titanium germanide formation, but not for cobalt germanide formation. The resistivities of titanium and cobalt germanides
were found to be 20 μΩ-cm and 35.3μΩ-cm, corresponding to TiGe2 and Co2Ge, respectively. During solid phase reactions of Ti with Ge, we have found that the Ti6Ge5 phase forms prior to TiGe2. The TiGe2 phase was found to form approximately at 800° C. Cobalt germanide formation was found to occur at relatively low temperatures
(425° C); however, the stability of the material is poor at elevated temperatures. 相似文献
3.
M. Sanganeria D. T. Grider M. C. öztürk J. J. Wortman 《Journal of Electronic Materials》1992,21(1):61-64
In-situ doped polycrystalline SixGe1-x
(x = 0.7) alloys were deposited by rapid thermal chemical vapor deposition (RTCVD) using the reactive gases SiH2Cl2, GeH4 and B2H6 in a H2 carrier gas. The depositions were performed at a total pressure of 4.0 Torr and at temperatures 600° C, 650° C and 700° C
and different B2H6 flow rates. The conditions were chosen to achieve high doping levels in the deposited films. Our results indicate negligible
effect of B2H6 flow on the deposition rate. The depositions follow an Arrhenius type behavior with an activation energy of 25 kcal/mole.
Boron incorporation in the films was found to follow a simple kinetic model with higher boron levels at lower deposition rates
and higher B2H6 flow rates. As-deposited resistivities as low as 2 mΩ-cm were obtained. Rapid thermal annealing (RTA) in the temperature
range 800-1000° C was found to reduce the resistivity only marginally due to the high levels of boron activation achieved
during the deposition process. The results indicate that polycrystalline SixGe1-x films can be deposited by RTCVD with resistivities comparable to those reported for in-situ doped polysilicon. 相似文献
4.
McIntosh Daniel N.; Silver Roxane Cohen; Wortman Camille B. 《Canadian Metallurgical Quarterly》1993,65(4):812
Parents (N?=?124) who had lost an infant to sudden infant death syndrome were interviewed 3 wks and 18 mo postloss. Two components of religion (religious participation and religious importance) were assessed, and their relations with 3 coping-process variables (perceived social support, cognitive processing of the loss, and finding meaning in the death) were examined. Greater religious participation was related to increased perception of social support and greater meaning found in the loss. Importance of religion was positively related to cognitive processing and finding meaning in the death. Furthermore, through these coping-process variables, religious participation and importance were indirectly related to greater well-being and less distress among parents 18 mo after their infants' deaths. Results suggest that further study of the social and cognitive aspects of religion would be profitable. (PsycINFO Database Record (c) 2010 APA, all rights reserved) 相似文献
5.
Veena Misra Xiaoli Xu Brian E. Hornung Richard T. Kuehn Donald S. Miles John R. Hauser Jimmie J. Wortman 《Journal of Electronic Materials》1996,25(3):527-535
In the present study, we have performed electrical characterization of oxides deposited via rapid thermal chemical vapor deposition using SiH4 and N2O. We have investigated the effect of temperature, pressure, and SiH4 to N2O ratio on the electrical and material properties of as-deposited films. We have found that as-deposited oxides deposited at low temperatures, low pressures, and with a low silane to nitrous oxide ratio of ~0.5% give good material and electrical properties. The as-deposited films are stoichiometric in nature and have high deposition rates. As-deposited films had very low Dit values, high breakdown fields, and excellent subthreshold swing. The leakage currents and metal oxide semiconductor field effect transistor current drive, although lower than thermal oxides, were found to be quite acceptable. We have also investigated the thickness dependence of the films and found that as the film thickness is reduced below 50Å, the reliability improves for all oxides including the silicon-rich deposited oxides. 相似文献
6.
The higher performance levels of modern gas turbine engines present significant challenges in the reli-ability of materials
in the turbine. The increased engine temperatures required to achieve the higher per-formance levels reduce the strength of
the materials used in the turbine sections of the engine. Various forms of thermal barrier coatings have been used for many
years to increase the reliability of gas turbine engine components. Recent experience with the physical vapor deposition process
using ceramic material has demonstrated success in extending the service life of turbine blades and nozzles. Engine test results
of turbine components with a 125 μm (0.005 in.) PVD TBC have demonstrated component operating tem-peratures of 56 to 83 °C
(100 to 150 °F) lower than non-PVD TBC components. Engine testing has also revealed that TBCs are susceptible to high angle
particle impact damage. Sand particles and other engine debris impact the TBC surface at the leading edge of airfoils and
fracture the PVD columns. As the impacting continues, the TBC erodes in local areas. Analysis of the eroded areas has shown
a slight increase in temperature over a fully coated area ; however, a significant temperature reduc-tion was realized over
an airfoil without TBC. 相似文献
7.
JC Langenbrunner PM Wortman WH Yeaton JJ Holloway 《Canadian Metallurgical Quarterly》1993,9(2):286-303
Carotid endarterectomy (CE) surgery for asymptomatic patients remains controversial despite hundreds of published studies and recent randomized trials. Safety and efficacy are assessed using a quantitative synthesis method derived from meta-analysis and a "critical multiplist" inference approach. In addition, multivariate analyses reveal that use of a surgical shunt could further improve CE outcomes. Methods are examined for both their "confirmatory" and "exploratory" value. 相似文献
8.
Yang R.Q. Bradshaw J.L. Bruno J.D. Pham J.T. Wortman D.E. 《Quantum Electronics, IEEE Journal of》2001,37(2):282-289
High-performance mid-infrared type-II interband cascade lasers have been demonstrated under continuous-wave (CW) conditions with record-high wall-plug efficiencies (>14%) and output powers (>100 mW/facet) above 77 K. Device characteristics of these type-II interband cascade lasers are investigated systematically in terms of their output powers and efficiencies. Also, by comparing the temperature dependence of the threshold currents under pulsed and CW conditions, the thermal resistance and maximum heat sink temperature for CW operation are estimated for several mesa sizes. The limiting factors due to device heating for high-power/high-efficiency operation are identified and discussed in connection with device dimensions and packaging for the purpose of assessing further improvements 相似文献
9.
Ultra-thin gate oxide breakdown in nMOSFET's has been studied for an oxide thickness of 1.5 nm using constant voltage stressing. The pre- and post-oxide breakdown characteristics of the device have been compared, and the results have shown a strong dependence on the breakdown locations. The oxide breakdown near the source/drain-to-gate overlap regions was found to be more severe on the post-breakdown characteristics of the device than breakdown in the channel. This observation may be related to the dependence of breakdown on the distribution of electric field and areas of different regions within the nMOSFET under stress 相似文献
10.