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1H or 4He depth profiling in 1H or 4He implanted silicon samples was performed by elastic recoil detection (ERD) with multicharged 19F ions at a small accelerator. Optimization of the experimental parameters such as incident ions energy and scattering geometry were calculated by computer simulation. Depth resolution of about 20-30nm at depth of 400nm for 1H and at depth of 300nm for 4He can be obtained, respectively. 相似文献
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本文描述的快速电磁阀,采用了背压和橡皮弹力关闭阀门,储能电容器通过紧靠可动阀体圆盘的驱动线圈临界阻尼放电打开阀门。阀门启动时间为100~200μs,打开时间为200~800μs。进气量可在大范围内连续可调。当背压和气库气压分别为P_b=P_N=1×10~5Pa时,实验重复五十次,进气量的均方误差不大于3%。 相似文献
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等离子体物理实验研究用的GBH-1装置是一个高比压快速磁压缩装置。此装置的核心部件之一的真空放电室是一种用非金属材料——95氧化铝陶瓷制成的。由于该真空放电室是大尺寸、厚壁、拉长截面的环,整体制造是困难的,只能烧制成多节的内环和外环,再用特制的粘结剂粘结而成。本文主要介绍如何选择粘结剂和粘结工艺以及真空放电室残余气体质谱分析的结果。 相似文献
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文章介绍了用1.7MV小串列加速器提供的4—7MeV多电荷C离子,采用弹性反冲法(ERD)分析了α-Si:H中氢元素的深度分布。计算表明,近表面处的深度分辨率为15-30nm,可探测深度100—700nm。探讨了入射能量和散射几何条件的优化问题。比较了几种分析方法的测量结果。 相似文献
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Elastic recoil detection (ERD) proposed for the analysis of light elements in a heavier matrix is an appropriate method for its specialities. Optimization of experimental parameters in ERD such as scattering geometry and incident beam energy is very important when using a small accelerator with energy lower than 10 MeV. In this paper a computer program ERDAl is developed for the purpose, and is proved to be useful for practical handling of ERD experiments. 相似文献
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