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ELASTIC RECOIL DETECTION ANALYSIS OF LIGHT ELEMENTS IN THIN FILMS USING 35 MeV~(35) Cl~(6+) BEAM 总被引:1,自引:0,他引:1
In this paper, an elastic recoil detection analysis method is described using 35 MeV ~(35)Cl as incident ions. This method can determine and profile simultaneously H, D, He, C and O or in the other case, H, C, N and O. The depth resolution for the elements heavier than He is better than 20 nm. It has been applied to study the Co/Si and TiN thin films, and the depth profiles of He implanted in monocrystal silicon. 相似文献
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