Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

In this paper,the double-discharge plasma generated by radio frequency(RF) and direct current(DC) has been investigated.In comparison with their single-frequency counterpart,the interaction between the two excitations is significant and beneficial.The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage;meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate.The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.     

同轴枪脉冲放电等离子体特性及其轴向输运速度分析

高密度、高速度等离子体的喷射源(同轴枪装置)是强流脉冲放电装置的热点。为此,实验研究了同轴枪放电装置产生的等离子体特性,以及不同参数下等离子体轴向的输运速度。通过对等离子体的光学与电学诊断,发现由同轴枪喷出的等离子体具有一定体积,并且该等离子体的电学特性以及轴向速度的大小受电压与气压等参数的影响较大。在固定气压下,放电电流以及等离子体轴向输运速度会随着电压的增加而增大;而在固定电压下,放电电流在气压增大时几乎不变,但等离子体轴向输运速度随着气压的增大而减小。此外,实验中均出现了多次放电的现象。