Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Situating natural language understanding within experience-based design

Building useful systems with an ability to understand "real" natural language input has long been an elusive goal for Artificial Intelligence. Well-known problems such as ambiguity, indirectness, and incompleteness of natural language inputs have thwarted efforts to build natural language interfaces to intelligent systems. In this article, we report on our work on a model of understanding natural language design specifications of physical devices such as simple electrical circuits. Our system, called KA, solves the classical problems of ambiguity, incompleteness and indirectness by exploiting the knowledge and problem-solving processes in the situation of designing simple physical devices. In addition, KA acquires its knowledge structures (apart from a basic ontology of devices) from the results of its problem-solving processes. Thus, KA can be bootstrapped to understand design specifications and user feedback about new devices using the knowledge structures it acquired from similar devices designed previously.In this paper, we report on three investigations in the KA project. Our first investigation demonstrates that KA can resolve ambiguities in design specifications as well as infer unarticulated requirements using the ontology, the knowledge structures, and the problem-solving processes provided by its design situation. The second investigation shows that KA's problem-solving capabilities help ascertain the relevance of indirect design specifications, and identify unspecified relations between detailed requirements. The third investigation demonstrates the extensibility of KA's theory of natural language understanding by showing that KA can interpret user feedback as well as design requirements. Our results demonstrate that situating language understanding in problem solving, such as device design in KA, provides effective solutions to unresolved problems in natural language processing.     

Adaptive motion control using neural network approximations

In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.     

Imperfections and impurity phases in flux grown RCrO3 (R = La,Yb) single crystals

Results of scanning electron microscopy (SEM) and energy dispersive X-ray analytical (EDAX) investigations, conducted on some elevated structures displayed by flux grown rare earth orthochromite, RCrO₃ (R = La, Yb) crystals, are presented. The peculiar structures exhibited by crystal surfaces indicate imperfections and impurity phases. EDAX of elevated structures reveals the various phases to be composed of lead associated materials which may probably be either Pb₂CrO₅ or Pb₂OF₂ (flux). Other secondary crystallization of impurity phases, ROF (R = La, Yb) is illustrated in the case of RCrO₃ (R = La, Yb) crystals. The elevated structures illustrate their non-stoichiometric behaviour. Precipitation of impurity phases and formation of imperfections during the growth of RCrO₃ (R = La, Yb) crystals and their effect on the crystalline quality is discussed.     

Topology preservation of template-based 6-subiteration reduction operations

Generally, a reduction operation (e.g., thinning and shrinking) on 3D binary images can be represented as a set of reduction templates where every object voxel of the image satisfying any template is turned to a background voxel. Generally, it is rather difficult, error-prone and time-consuming for verifying the topological soundness of a 3D parallel reduction operation. This paper proposes sufficient conditions of time complexity O(n) for verifying the topological soundness of 3D parallel 6-subiteration reduction operations of n templates where such a kind of 3D reduction operations is performed alternatively from the six orthogonal directions to turn object voxels to background voxels. By such sufficient conditions, the topology soundness of a 3D 6-subiteration parallel reduction operation can be verified by checking each and every of its templates.     

Control of discrete time nonlinear systems with a time-varying structure

In this paper, we present a control methodology for a class of discrete time nonlinear systems that depend on a possibly exogenous scheduling variable. This class of systems consists of an interpolation of nonlinear dynamic equations in strict feedback form, and it may represent systems with a time-varying nonlinear structure. Moreover, this class of systems is able to represent some cases of gain scheduling control, Takagi-Sugeno fuzzy systems, as well as input-output realizations of nonlinear systems which are approximated via localized linearizations. We present two control theorems, one using what we call a “global” approach (akin to traditional backstepping), and a “local” approach, our main result, where backstepping is again used but the control law is an interpolation of local control terms. An aircraft wing rock regulation problem with varying angle of attack is used to illustrate and compare the two approaches.     

Stability robustness of networked control systems with respect to packet loss

This paper is concerned with stability analysis of discrete-time networked control systems over a communication channel subject to packet loss whose behavior is modeled by an i.i.d Bernoulli process with a packet dropping probability bounded by a constant. A necessary and sufficient condition for stability is obtained. A packet dropping margin is introduced as a measure of stability robustness of a system against packet dropping, and a formula for it is derived. A design method is proposed for achieving a large margin subject to a constraint that the system has a set of prescribed nominal closed-loop poles.     

Decentralized adaptive coordinated control of multiple robot arms without using a force sensor

This paper presents a distributed adaptive coordinated control method for multiple robot arms grasping a common object. The cases of rigid contact and rolling contact are analyzed. In the proposed controller, the dynamic parameters of both object and robot arms are estimated adaptively. The desired motions of the robot arms are generated by an estimated object reference model. The control method requires only the measurements of the positions and velocities of the object and robot arms, but not the measurements of forces and moments at contact points. The asymptotic convergence of trajectory is proven by the Lyapunov-like Lemma. Experiments involving two robot arms handling a common object are shown.