Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation

A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide interferometric detection resolution of the proof-mass displacement when illuminated with coherent light. The sensor architecture includes a monolithically integrated electrostatic actuation port that enables the application of precisely controlled broadband forces to the proof mass while the displacement is simultaneously and independently measured optically. This enables several useful features such as dynamic self-characterization and a variety of force-feedback modalities, including alteration of device dynamics in situ. These features are experimentally demonstrated with sensors that have been optoelectronically integrated into sub-cubic-millimeter volumes using an entirely surface-normal, rigid, and robust embodiment incorporating vertical cavity surface emitting lasers and integrated photodetector arrays. In addition to small form factor and high acceleration resolution, the ability to self-characterize and alter device dynamics in situ may be advantageous. This allows periodic calibration and in situ matching of sensor dynamics among an array of accelerometers or seismometers configured in a network.     

Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

In this letter, a 400-mumx400-mum 2-D capacitive micromachined ultrasonic transducer (cMUT) array element is experimentally characterised, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8x10(-7) nm/ radical(Hz) displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging.     

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection

Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2/spl times/10/sup -4/ /spl Aring///spl radic/Hz level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19/spl times/19 array of membranes operating at 750 kHz.     

A comparison of simulated annealing and genetic algorithm for optimum design of nonlinear steel space frames

In this article, two algorithms are presented for the optimum design of geometrically nonlinear steel space frames that are based on simulated annealing and genetic algorithm. The design algorithms obtain minimum weight frames by selecting suitable sections from a standard set of steel sections such as the American Institute of Steel Construction (AISC) wide-flange shapes. Stress constraints of AISC Load and Resistance Factor Design (LRFD) and AISC Allowable Stress Design (ASD) specifications, maximum (lateral displacement) and interstorey drift constraints, and also size constraints for columns were imposed on frames. The algorithms were applied to the optimum design of three space frame structures, which have a very small amount of nonlinearity. The unconstrained form of objective function was applied in both optimum design algorithms, and constant penalty factors were used instead of gradually increasing ones. Although genetic algorithm took much less time to converge, the comparisons showed that the simulated annealing algorithm yielded better designs together with AISC-LRFD code specification.     

Controlling tip–sample interaction forces during a single tap for improved topography and mechanical property imaging of soft materials by AFM

We introduce a method that exploits the “active” nature of the force-sensing integrated readout and active tip (FIRAT), a recently introduced atomic force microscopy (AFM) probe, to control the interaction forces during individual tapping events in tapping mode (TM) AFM. In this method the probe tip is actively retracted if the tip–sample interaction force exceeds a user-specified force threshold during a single tap while the tip is still in contact with the surface. The active tip control (ATC) circuitry designed for this method makes it possible to control the repulsive forces and indentation into soft samples, limiting the repulsive forces during the scan while avoiding instability due to attractive forces. We demonstrate the accurate topographical imaging capability of this method on suitable samples that possess both soft and stiff features.     

Bulk acoustic resonator based on piezoelectric ZnO belts

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.     

CMUTS with dual-electrode structure for improved transmit and receive performance

In this paper, we introduce capacitive micro-machined ultrasonic transducers (CMUTs) with electrically isolated multiple electrodes embedded in the same silicon nitride CMUT membrane. Some of the advantages of this structure are demonstrated using a dual-electrode CMUT with separate transmit and receive electrodes as an example. By locating the transmit electrodes near the edges of a rectangular CMUT membrane, the stable displacement range, hence the maximum pressure amplitude during transmit mode is increased without collapsing the membrane when operated within static collapse voltage range. In the receive mode, the center receive electrode is brought closer to the substrate by biasing the side electrodes, and a higher electromechanical transformer ratio is obtained at low direct current (DC) bias. Therefore, dual-electrode CMUT has an effectively larger gap as compared to conventional CMUT during transmit, and it has an effectively smaller gap during receive. Demonstrative experiments are performed on dual-electrode CMUTs with rectangular membranes with different side and center electrode sizes for transmit and receive measurements. By using the two 4-microm wide side electrodes and an 8-microm wide center electrode on a 20-microm wide membrane, a 6.8 dB increase in maximum output pressure is obtained with side electrode excitation as compared to conventional center electrode. Similarly, the receive performance improvement was demonstrated while reducing the DC bias requirements. Simple finite-element and equivalent circuit-based models were developed to successfully model the behavior of dual-electrode CMUTs. Simulations show that, with simple modifications, more than 10 dB overall sensitivity improvement is feasible with dual-electrode CMUTs with rectangular membranes.     

Thermal-mechanical-noise-based CMUT characterization and sensing

When capacitive micromachined ultrasonic transducers (CMUTs) are monolithically integrated with custom-designed low-noise electronics, the output noise of the system can be dominated by the CMUT thermal-mechanical noise both in air and in immersion even for devices with low capacitance. Because the thermal-mechanical noise can be related to the electrical admittance of the CMUTs, this provides an effective means of device characterization. This approach yields a novel method to test the functionality and uniformity of CMUT arrays and the integrated electronics when a direct connection to CMUT array element terminals is not available. Because these measurements can be performed in air at the wafer level, the approach is suitable for batch manufacturing and testing. We demonstrate this method on the elements of an 800-μm-diameter CMUT-on-CMOS array designed for intravascular imaging in the 10 to 20 MHz range. Noise measurements in air show the expected resonance behavior and spring softening effects. Noise measurements in immersion for the same array provide useful information on both the acoustic cross talk and radiation properties of the CMUT array elements. The good agreement between a CMUT model based on finite difference and boundary element methods and the noise measurements validates the model and indicates that the output noise is indeed dominated by thermal-mechanical noise. The measurement method can be exploited to implement CMUT-based passive sensors to measure immersion medium properties, or other parameters affecting the electro-mechanics of the CMUT structure.     

A Lamb wave lens for acoustic microscopy

In a conventional scanning acoustic microscope the excited leaky modes contribute significantly to the high contrast obtained in the images. However, all such modes exist simultaneously, and the interpretation of the images is not straightforward, especially in layered media. A lens geometry is proposed that can be used with acoustic microscopes to image layered solid structures. This lens can focus the acoustic waves in only one of the Lamb wave modes of the layered solid with a high efficiency. V(Z) curves obtained from this lens are more sensitive to material properties compared to that obtained from conventional lens. Measuring the return signal as a function of frequency results in another characteristic curve, V(f). The Lamb wave lens and the associated characterization methods for the layered structures are described. The results presented show that the Lamb wave lens is at least an order of magnitude more sensitive than the conventional lens and can easily differentiate between a good bond and disbond in a layered structure.     

Note: Seesaw actuation of atomic force microscope probes for improved imaging bandwidth and displacement range

The authors describe a method of actuation for atomic force microscope (AFM) probes to improve imaging speed and displacement range simultaneously. Unlike conventional piezoelectric tube actuation, the proposed method involves a lever and fulcrum "seesaw" like actuation mechanism that uses a small, fast piezoelectric transducer. The lever arm of the seesaw mechanism increases the apparent displacement range by an adjustable gain factor, overcoming the standard tradeoff between imaging speed and displacement range. Experimental characterization of a cantilever holder implementing the method is provided together with comparative line scans obtained with contact mode imaging. An imaging bandwidth of 30 kHz in air with the current setup was demonstrated.