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The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.  相似文献   
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In this paper, we present a control methodology for a class of discrete time nonlinear systems that depend on a possibly exogenous scheduling variable. This class of systems consists of an interpolation of nonlinear dynamic equations in strict feedback form, and it may represent systems with a time-varying nonlinear structure. Moreover, this class of systems is able to represent some cases of gain scheduling control, Takagi-Sugeno fuzzy systems, as well as input-output realizations of nonlinear systems which are approximated via localized linearizations. We present two control theorems, one using what we call a “global” approach (akin to traditional backstepping), and a “local” approach, our main result, where backstepping is again used but the control law is an interpolation of local control terms. An aircraft wing rock regulation problem with varying angle of attack is used to illustrate and compare the two approaches.  相似文献   
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The paper is devoted to the first order delayed linear system with relay output controlled by the proportional-integral (PI) regulator. The deterministic system exhibits stable oscillations, and, since the system itself is stable, it can be suitable to switch off the controller if there are no disturbances during a long time interval. In the present work, the random disturbances are modelled by a Poisson stream of impulses, and the goal is to determine the instants of switching on (off) of the PI controller. After several assumptions and quantization of the time axis, we construct the new optimal control problem which is successfully solved with the help of the dynamic programming approach.  相似文献   
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A stochastic realization problem of a stationary stochastic process is re-visited, and a new stochastically balanced realization algorithm is derived in a Hilbert space generated by second-order stationary processes. The present algorithm computes a stochastically balanced realization by means of the singular value decomposition of a weighted block Hankel matrix derived by a “block LQ decomposition”. Extension to a stochastic subspace identification method explains how the proposed abstract algorithm is implemented in system identification.  相似文献   
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Reset controllers are linear controllers that reset some of their states to zero when their input is zero. We are interested in their feedback connection with linear plants, and in this paper we establish fundamental closed-loop properties including stability and asymptotic tracking. This paper considers more general reset structures than previously considered, allowing for higher-order controllers and partial-state resetting. It gives a testable necessary and sufficient condition for quadratic stability and links it to both uniform bounded-input bounded-state stability and steady-state performance. Unlike previous related research, which includes the study of impulsive differential equations, our stability results require no assumptions on the evolution of reset times.  相似文献   
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This paper presents a system that can perform pedestrian detection and tracking using vision-based techniques. A very important issue in the field of intelligent transportation system is to prevent pedestrians from being hit by vehicles. Recently, a great number of vision-based techniques have been proposed for this purpose. In this paper, we propose a vision-based method, which combines the use of a pedestrian model as well as the walking rhythm of pedestrians to detect and track walking pedestrians. Through integrating some spatial and temporal information grabbed by a vision system, we are able to develop a reliable system that can be used to prevent traffic accidents happened at crossroads. In addition, the proposed system can deal with the occlusion problem. Experimental results obtained by executing some real world cases have demonstrated that the proposed system is indeed superb.  相似文献   
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In this article, we present a parallel image processing system based on the concept of reactive agents. Our system lies in the oRis language, which allows to describe finely and simply the agents’ behaviors to detect image features. We also present a method of segmentation using a multi-agent system, and two biological applications made with oRis. The stopping of this multi-agent system is implemented through a technique issued from immunology: the apoptosis.  相似文献   
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This paper presents a method to design an output-feedback controller that simultaneously solves global asymptotic stabilization and tracking of an underactuated omni-directional intelligent navigator—a spherical underwater vehicle moving in a horizontal plane (i.e. at a constant depth). The vehicle does not have a sway actuator and has only position and orientation measurements available. The control development is based on Lyapunov's direct method, backstepping technique and use of interconnected structure of the vehicle dynamics. Numerical simulations demonstrate the results.  相似文献   
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