Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

PIMS在企业生产经营中的应用

介绍PIMS在企业生产经营中的应用 ,运用PIMS可对炼油化工企业进行原油采购决策、加工保本点预算、效益预测、物流分配、整体流程优化、投资分析、瓶颈制约因素探讨、原料和产品库存管理、经济活动分析等 ,并结合生产装置特点和市场环境影响因素 ,获取最大生产经营效益。根据影子价格 ,找出提高效益的潜力 ,确定产品、中间产品或半成品合理价格 ,规范关联交易 ,增强企业市场应变能力 ,提高经济效益与管理水平。     

A stochastic realization algorithm via block LQ decomposition in Hilbert space

A stochastic realization problem of a stationary stochastic process is re-visited, and a new stochastically balanced realization algorithm is derived in a Hilbert space generated by second-order stationary processes. The present algorithm computes a stochastically balanced realization by means of the singular value decomposition of a weighted block Hankel matrix derived by a “block LQ decomposition”. Extension to a stochastic subspace identification method explains how the proposed abstract algorithm is implemented in system identification.     

Pedestrian detection and tracking at crossroads

This paper presents a system that can perform pedestrian detection and tracking using vision-based techniques. A very important issue in the field of intelligent transportation system is to prevent pedestrians from being hit by vehicles. Recently, a great number of vision-based techniques have been proposed for this purpose. In this paper, we propose a vision-based method, which combines the use of a pedestrian model as well as the walking rhythm of pedestrians to detect and track walking pedestrians. Through integrating some spatial and temporal information grabbed by a vision system, we are able to develop a reliable system that can be used to prevent traffic accidents happened at crossroads. In addition, the proposed system can deal with the occlusion problem. Experimental results obtained by executing some real world cases have demonstrated that the proposed system is indeed superb.     

An immune oriented multi-agent system for biological image processing

In this article, we present a parallel image processing system based on the concept of reactive agents. Our system lies in the oRis language, which allows to describe finely and simply the agents’ behaviors to detect image features. We also present a method of segmentation using a multi-agent system, and two biological applications made with oRis. The stopping of this multi-agent system is implemented through a technique issued from immunology: the apoptosis.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Frequency domain solution to delay-type Nehari problem

This paper generalizes the frequency-domain results on the delay-type Nehari problem in the stable case to the unstable case. The solvability condition of the delay-type Nehari problem is formulated in terms of the nonsingularity of three matrices. The optimal value γ_opt is the maximal γ∈(0,∞) such that one of the three matrices becomes singular. All sub-optimal compensators are parameterized in a transparent structure incorporating a modified Smith predictor.     

Directional features in online handwriting recognition

The selection of valuable features is crucial in pattern recognition. In this paper we deal with the issue that part of features originate from directional instead of common linear data. Both for directional and linear data a theory for a statistical modeling exists. However, none of these theories gives an integrated solution to problems, where linear and directional variables are to be combined in a single, multivariate probability density function. We describe a general approach for a unified statistical modeling, given the constraint that variances of the circular variables are small. The method is practically evaluated in the context of our online handwriting recognition system frog on hand and the so-called tangent slope angle feature. Recognition results are compared with two alternative modeling approaches. The proposed solution gives significant improvements in recognition accuracy, computational speed and memory requirements.