Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Long-term transients in a reactor under forced concentration cycling

In the approach to a cycle-invariant state in the forced feed concentration cycling of the CO oxidation over a NiO catalyst, a very long transient has been observed lasting 80 ks or more. This transient appears to be associated only with CO pretreatment of the catalyst and is not a general phenomenon. The slow convergence to the cycle-invariant state reported in certain modelling calculations in the literature appears to have a different cause.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Kinetic model for water/oil absorption of mesquite gum (Prosopis juliflora) and gum arabic (Acacia senegal)

The water and oil uptake of mesquite and arabic gums in powdered form was studied at temperatures of 23, 35 and 45°C. A previously proposed equation to predict osmotic equilibrium was tested using the experimental data with both gums and a good statistical fit was obtained. Mesquite gum showed the highest water and oil absorption at all temperatures studied. Temperature dependence of the reciprocal of the S₁ and WL_∞ were determined using an Arrhenius equation. The activation energy for water and oil absorption for gum arabic was 21.98 and 39.57 kJ mol⁻¹, compared to that of mesquite gum having values of 15.79 and 46.16 kJ mol⁻¹, respectively. A second order kinetic model was obtained for water and oil absorption for both gums.     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.