Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Analysis of viscoelastic laminated composite plates

A micromechanics analysis is performed for the determination of the five independent elastic moduli of unidirectional fiber composites. By considering viscoelastic phases and by using the correspondence principle and the inversion of the Laplace transform, the five time-dependent functions which characterize the effective behavior of viscoelastic composites are established. The predicted time-dependent behavior is applied for the analysis of viscoelastic laminated plates. The resulting viscoelastic effects are shown, and comparison between the results obtained within the classical laminated plate theory and the first-order shear deformation theory is discussed.     

Adaptive motion control using neural network approximations

In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.     

Synthesis of N,N-diethyl-N-{4-[(E)-(4-nitrophenyl)diazenyl]phenyl}amine via in situ diazotisation and coupling in supercritical carbon dioxide

The synthesis of azo dyes via a conventional aqueous-based diazotisation and coupling reaction requires the use of relatively high concentrations of mineral acids, which leads to high electrolyte concentrations in wastewater. Reported in this paper is an environmentally benign one-pot method for the synthesis of a nonionic azo dye, N,N -diethyl- N -{4-[( E )-(4-nitrophenyl)diazenyl]phenyl}amine, in supercritical carbon dioxide without using a mineral acid. The product yield increased significantly with temperature, with 91% theoretical yield afforded at 80 °C. The pressure of the system had little influence on product yield.     

Measurement of Gibbs energies of formation of CoF2 and MnF2 using a new composite dispersed solid electrolyte

Gibbs energies of formation of CoF₂ and MnF₂ have been measured in the temperature range from 700 to 1100 K using Al₂O₃-dispersed CaF₂ solid electrolyte and Ni+NiF₂ as the reference electrode. The dispersed solid electrolyte has higher conductivity than pure CaF₂ thus permitting accurate measurements at lower temperatures. However, to prevent reaction between Al₂O₃ in the solid electrolyte and NiF₂ (or CoF₂) at the electrode, the dispersed solid electrolyte was coated with pure CaF₂, thus creating a composite structure. The free energies of formation of CoF₂ and MnF₂ are (± 1700) J mol⁻¹; {fx37-1} The third law analysis gives the enthalpy of formation of solid CoF₂ as ΔH° (298·15 K) = −672·69 (± 0·1) kJ mol⁻¹, which compares with a value of −671·5 (± 4) kJ mol⁻¹ given in Janaf tables. For solid MnF₂, ΔH°(298·15 K) = − 854·97 (± 0·13) kJ mol⁻¹, which is significantly different from a value of −803·3 kJ mol⁻¹ given in the compilation by Barinet al.