Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

An alternating digital tree (ADT) algorithm for 3D geometric searching and intersection problems

A searching algorithm is presented for determining which members of a set of n points in an N dimensional space lie inside a prescribed space subregion. The algorithm is then extended to handle finite size objects as well as points. In this form it is capable of solving problems such as that of finding the objects from a given set which intersect with a prescribed object. The suitability of the algorithm is demonstrated for the problem of three dimensional unstructured mesh generation using the advancing front method.     

Optimal management of logistic activities in multi-site environments

The new emerging area of Enterprise Wide Optimization (EWO) has focused the attention in effectively solving the combined production/distribution scheduling problem. The importance of logistic activities performed in multi-site environments comes from the relative magnitude of the associated transportation costs and the good chance of getting large savings on such expenses. This paper first develops an exact MILP mathematical formulation for the multiple vehicle time-window-constrained pickup and delivery (MVPDPTW) problem. The approach is able to account for many-to-many transportation requests, pure pickup and delivery tasks, heterogeneous vehicles and multiple depots. Optimal solutions for a variety of benchmark problems with cluster/random distributions of pickup and delivery locations and limited sizes in terms of customer requests and vehicles have been discovered. However, the computational cost exponentially grows with the number of requests. For large-scale m-PDPTW problems, a local search improvement algorithm steadily providing a better solution through two evolutionary steps is also presented. A neighborhood structure around the starting solution is generated by first allowing multiple request exchanges among nearby trips and then permitting the reordering of nodes on every individual route. If a better set of routes is found, both steps are repeated until no improved solution is discovered. Compact MILP mathematical formulations for both sub-problems have been developed and solved through an efficient branch-and-bound algorithm. A significant number of large-scale m-PDPTW benchmark problems, some of them including up to 100 transportation requests, were successfully solved in reasonable CPU times.     

A stochastic realization algorithm via block LQ decomposition in Hilbert space

A stochastic realization problem of a stationary stochastic process is re-visited, and a new stochastically balanced realization algorithm is derived in a Hilbert space generated by second-order stationary processes. The present algorithm computes a stochastically balanced realization by means of the singular value decomposition of a weighted block Hankel matrix derived by a “block LQ decomposition”. Extension to a stochastic subspace identification method explains how the proposed abstract algorithm is implemented in system identification.     

Pedestrian detection and tracking at crossroads

This paper presents a system that can perform pedestrian detection and tracking using vision-based techniques. A very important issue in the field of intelligent transportation system is to prevent pedestrians from being hit by vehicles. Recently, a great number of vision-based techniques have been proposed for this purpose. In this paper, we propose a vision-based method, which combines the use of a pedestrian model as well as the walking rhythm of pedestrians to detect and track walking pedestrians. Through integrating some spatial and temporal information grabbed by a vision system, we are able to develop a reliable system that can be used to prevent traffic accidents happened at crossroads. In addition, the proposed system can deal with the occlusion problem. Experimental results obtained by executing some real world cases have demonstrated that the proposed system is indeed superb.     

An immune oriented multi-agent system for biological image processing

In this article, we present a parallel image processing system based on the concept of reactive agents. Our system lies in the oRis language, which allows to describe finely and simply the agents’ behaviors to detect image features. We also present a method of segmentation using a multi-agent system, and two biological applications made with oRis. The stopping of this multi-agent system is implemented through a technique issued from immunology: the apoptosis.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Frequency domain solution to delay-type Nehari problem

This paper generalizes the frequency-domain results on the delay-type Nehari problem in the stable case to the unstable case. The solvability condition of the delay-type Nehari problem is formulated in terms of the nonsingularity of three matrices. The optimal value γ_opt is the maximal γ∈(0,∞) such that one of the three matrices becomes singular. All sub-optimal compensators are parameterized in a transparent structure incorporating a modified Smith predictor.