Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Presupposition failure — A comedy of errors

Presuppositions of utterances are the pieces of information you convey with an utterance no matter whether your utterance is true or not. We first study presupposition in a very simple framework of updating propositional information, with examples of how presuppositions of complex propositional updates can be calculated. Next we move on to presuppositions and quantification, in the context of a dynamic version of predicate logic, suitably modified to allow for presupposition failure. In both the propositional and the quantificational case, presupposition failure can be viewed as error abortion of procedures. Thus, a dynamic assertion logic which describes the preconditions for error abortion is the suitable tool for analysing presupposition.     

RasterCalc: Calculus for Operations on Graphics Colour Rasters

An extended model and calculus, called RasterCalc, is presented for operations on discrete graphics rasters, including their colour functions. The operations are separated into two main categories: operations on domains, and operations on colour functions. The operations are further classified as local and remote, depending on the correspondence between destination and source pixels. The new raster element or pixel can be a function of a single element from one or more rasters, a function of a small area from other rasters, or a function of entire rasters. Local operations have their main applications in computer graphics, while remote operations are more oriented towards image processing. A mathematically oriented notation is used to define and represent the operations included. RasterCalc has been implemented as a procedure package in Pascal, to be used on a powerful, yet expensive display. Recently a C version has been completed for a personal colour computer with a special chip for raster operations. The work reported in this paper is partially supplied by the Dutch Technical Sciences Foundation, under project number LWI 14.0130: “Facilities for raster graphics in programming languages”     

Evaluation of Digitally Encoded Layer‐by‐layer Coated Microparticles as Cell Carriers

To obtain more biologically relevant data there is a growing interest in the use of living cells for assaying the biological activity of unknown chemical compounds. Density ‘multiplex’ cell‐based assays, where different cell types are mixed in one well and simultaneously investigated upon exposure to a certain compound are beginning to emerge. To be able to identify the cells they should be attached to microscopic carriers that are encoded. This paper investigates how digitally encoded microparticles can be loaded with cells while keeping the digital code in the microcarriers readable. It turns out that coating the surface of the encoded microcarriers with polyelectrolytes using the layer‐by‐layer (LbL) approach provides the microcarriers with a ‘highly functional’ surface. The polyelectrolyte layer allows the growth of the cells, allows the orientation of the cell loaded microcarriers in a magnetic field, and does not hamper the reading of the code. It has further been shown that the cells growing on the polyelectrolyte layer can become transduced by adenoviral particles hosted by the polyelectrolyte layer. It is concluded that the digitally encoded microparticles are promising materials for use in biomedical and pharmaceutical in‐vitro research where cells are used as tools.     

Optimal and reinforced robustness designs of fuzzy variable structure tracking control for a piezoelectric actuator system

In this paper, a piezoelectric actuator (PEA) system is approximated by N subsystems, which are described by pulse transfer functions. The approximation error between the PEA system and the fuzzy linear pulse transfer function system is represented by additive nonlinear time-varying uncertainties in every subsystem. First, a dead-beat to the switching surface for every ideal subsystem is designed. It is called the "variable structure tracking control". The output disturbance of the ith subsystem is caused by the approximation error of fuzzy-model and the interaction dynamics resulting from other subsystems. In general, it is not small. Then, the H/sup /spl infin//-norm of the sensitivity function between the switching surface and the output disturbance is minimized. It is the "optimal robustness". Although the effect of the output disturbance is attenuated, a better performance can be reinforced by a switching control which is based on the Lyapunov redesign. This is the final step for the robustness design of control, which is "reinforced robustness". The stability of the overall system is verified by Lyapunov stability theory. Experimental work of a PEA system was carried out to confirm the validity of the proposed control.