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A comparative study between computational and experimental results for pressure-driven binary gas flows through long microchannels is performed. The theoretical formulation is based on the McCormack kinetic model and the computational results are valid in the whole range of the Knudsen number. Diffusion effects are taken into consideration. The experimental work is based on the Constant Volume Method, and the results are in the slip and transition regime. Using both approaches, the molar flow rates of the He–Ar gas mixture flowing through a rectangular microchannel are estimated for a wide range of pressure drops between the upstream and downstream reservoirs and several mixture concentrations varying from pure He to pure Ar. In all cases, a very good agreement is found, within the margins of the introduced modeling and measurement uncertainties. In addition, computational results for the pressure and concentration distributions along the channel are provided. As far as the authors are aware of, this is the first detailed and complete comparative study between theory and experiment for gaseous flows through long microchannels in the case of binary mixtures.  相似文献   
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A novel experimental setup for gas microflows   总被引:1,自引:0,他引:1  
A new experimental setup for flow rate measurement of gases through microsystems is presented. Its principle is based on two complementary techniques, called droplet tracking method and constant-volume method. Experimental data on helium and argon isothermal flows through rectangular microchannels are presented and compared with computational results based on a continuum model with second-order boundary conditions and on the linearized kinetic BGK equation. A very good agreement is found between theory and experiment for both gases, assuming purely diffuse accommodation at the walls. Also, some experimental data for a binary mixture of monatomic gases are presented and compared with kinetic theory based on the McCormack model.  相似文献   
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