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The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.  相似文献   
3.
该工艺技术是在原三联作(TCP+MFE+JET)基础上,根据大港油田勘探试油(测试)的需要,研制开发出的又一新技术,与原三联作相比,一趟管柱不但完成求产、测压、泵排工作,而且还能进行酸化等措施,提高了资料品质,减少了作业成本。经过6井次现场应用,全部达到了设计要求,取得了工艺、资料、成本、速度的较大进步,具有较高推广应用价值。  相似文献   
4.
E-business success factors are Important for traditional enterprises to implement e-business. This topic is attracting more and more researchers to study. This paper makes an exploratory study on the factors influencing e-business success. Firstly, based on the literature review, 52 factors are suggested. Secondly, two rounds of survey with Delphi method are conducted. Qualitative and quantitative analysis are used to identify 57 factors. This is the foundation of empirical study.  相似文献   
5.
PP-g-AA的制备和表征   总被引:6,自引:0,他引:6  
用熔融接枝方法制备了聚丙烯-g-丙烯酸(PP-g-AA)。用光电子能谱,广角X射线衍射,红外光谱和化学滴定方法对接枝物进行了定性和定量表征。讨论了单体和引发剂浓度对接枝率的影响,确定了用红外光谱法测定接枝物含量的经验公式  相似文献   
6.
Adaptive motion control using neural network approximations   总被引:1,自引:0,他引:1  
In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.  相似文献   
7.
Generally, a reduction operation (e.g., thinning and shrinking) on 3D binary images can be represented as a set of reduction templates where every object voxel of the image satisfying any template is turned to a background voxel. Generally, it is rather difficult, error-prone and time-consuming for verifying the topological soundness of a 3D parallel reduction operation. This paper proposes sufficient conditions of time complexity O(n) for verifying the topological soundness of 3D parallel 6-subiteration reduction operations of n templates where such a kind of 3D reduction operations is performed alternatively from the six orthogonal directions to turn object voxels to background voxels. By such sufficient conditions, the topology soundness of a 3D 6-subiteration parallel reduction operation can be verified by checking each and every of its templates.  相似文献   
8.
In this paper, we present a control methodology for a class of discrete time nonlinear systems that depend on a possibly exogenous scheduling variable. This class of systems consists of an interpolation of nonlinear dynamic equations in strict feedback form, and it may represent systems with a time-varying nonlinear structure. Moreover, this class of systems is able to represent some cases of gain scheduling control, Takagi-Sugeno fuzzy systems, as well as input-output realizations of nonlinear systems which are approximated via localized linearizations. We present two control theorems, one using what we call a “global” approach (akin to traditional backstepping), and a “local” approach, our main result, where backstepping is again used but the control law is an interpolation of local control terms. An aircraft wing rock regulation problem with varying angle of attack is used to illustrate and compare the two approaches.  相似文献   
9.
This paper is concerned with stability analysis of discrete-time networked control systems over a communication channel subject to packet loss whose behavior is modeled by an i.i.d Bernoulli process with a packet dropping probability bounded by a constant. A necessary and sufficient condition for stability is obtained. A packet dropping margin is introduced as a measure of stability robustness of a system against packet dropping, and a formula for it is derived. A design method is proposed for achieving a large margin subject to a constraint that the system has a set of prescribed nominal closed-loop poles.  相似文献   
10.
This paper presents a distributed adaptive coordinated control method for multiple robot arms grasping a common object. The cases of rigid contact and rolling contact are analyzed. In the proposed controller, the dynamic parameters of both object and robot arms are estimated adaptively. The desired motions of the robot arms are generated by an estimated object reference model. The control method requires only the measurements of the positions and velocities of the object and robot arms, but not the measurements of forces and moments at contact points. The asymptotic convergence of trajectory is proven by the Lyapunov-like Lemma. Experiments involving two robot arms handling a common object are shown.  相似文献   
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