MEMS-based gas flow sensors

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements, sensors, actuators, and electronics on a single silicon substrate in order to accomplish a multitude of different tasks in a diverse range of fields. The potential for device miniaturization made possible by MEMS micro-fabrication techniques has facilitated the development of many new applications, such as highly compact, non-invasive pressure sensors, accelerometers, gas sensors, etc. Besides their small physical footprint, such devices possess many other advantages compared to their macro-scale counterparts, including greater precision, lower power consumption, more rapid response, and the potential for low-cost batch production. One area in which MEMS technology has attracted particular attention is that of flow measurement. Broadly speaking, existing micro-flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation. This paper commences by providing a high level overview of the MEMS field and then describes some of the fundamental thermal and non-thermal micro-flow sensors presented in the literature over the past 30 years or so.     

Experimental and numerical investigation into the joule heating effect for electrokinetically driven microfluidic chips utilizing total internal reflection fluorescence microscopy

This paper presents a detection scheme for analyzing the temperature distribution nearby the channel wall in a microfluidic chip utilizing a temperature-dependent fluorescence dye. An advanced optical microscope system—total internal reflection fluorescence microscope (TIRFM) is used for measuring the temperature distribution on the channel wall at the point of electroosmotic flow in an electrokinetically driven microfluidic chip. In order to meet the short working distance of the objective type TIRFM scheme, microscope cover glass slits are used to fabricate the microfluidic chips. The short fluorescence excitation depth from a TIRFM system makes the intensity information obtained using TIRFM is not sensitive to the channel depth variation which ususally biases the measured results while using a conventional Epi-fluorescence microscope (EPI-FM). Therefore, a TIRFM can precisely describe the temperature profile of the distance within 100 nm of the channel wall where consists of the Stern layer and the diffusion layer for an electrokinetic microfluidic system. Results indicate the proposed TIRFM provides higher measurement sensitivity over the EPI-FM. Significant temperature gradient along the channel depth is experimentally observed. In addition, the measured wall temperature distributions can be the boundary conditions for numerical investigation into the joule heating effect. The proposed method gives a precise temperature profile of microfluidic channels and shows the substantial impact on developing a numerical simulation model for precisely predicting the joule heating effect in microfluidic chips.     

MEMS-based formaldehyde gas sensor integrated with a micro-hotplate

This paper presents a novel micro-fabricated formaldehyde gas sensor with enhanced sensitivity and detection resolution capabilities. The device comprises a quartz substrate with Pt heaters as a micro-hotplate and deposited formaldehyde-sensing layer on it. A sputtered NiO thin film is used as the formaldehyde-sensing layer. A specific orientation of NiO becomes more apparent as the substrate temperature increases in the sputtering process, which helps the formation of NiO material with a correct stoichiometric ratio. The gas sensor incorporates Pt heating resistors integrated with a micro-hotplate to provide a heating function and utilizes Au inter-digitated electrodes. When formaldehyde is present in the atmosphere, oxydation happens near the sensing layer with a high temperature caused by the micro-hotplate and causes a change in the electrical conductivity of the NiO film. Therefore, the measured resistance between the inter-digitated electrodes changes correspondingly. The application of a voltage to the Pt heaters causes the temperature of the micro-hotplate to increase, which in turn enhances the sensitivity of the sensor. The nanometer scale grain size of the sputtered oxide thin film is conducive to improving the sensitivity of the gas sensor. The experimental results indicate that the developed device has a high stability (0.23%), a low hysteresis value (0.18%), a quick response time (13.0 s), a high degree of sensitivity (0.14 Ω ppm⁻¹), and a detection capability of less than 1.2 ppm.

     

Manipulation of microparticles using new modes of traveling-wave-dielectrophoretic forces: numerical Simulation and experiments

This paper presents a microchip device which uses traveling-wave-dielectrophoretic (twDEP) forces for the manipulation of microparticles and yeast cells. The dielectrophoretic forces generated under different operating conditions are simulated numerically, and the electric field distributions, force distributions and microparticle traces are investigated thoroughly. The paper presents two innovative modes of microparticle manipulation using positive (only one electrode is active at any instant in time, while the other three electrodes are all switched off) and negative (one electrode is "off", and the other electrodes are "on") dielectrophoretic forces. Micromachining techniques are used to fabricate micro-twDEP chips. The capability of electrode arrays in manipulating bioparticles is demonstrated by driving yeast cells in a suspension medium. The current experimental data confirm that dielectrophoretic forces can be used successfully for the collection, alignment, step-wise movement and general manipulation of cells.     

Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors

This paper presents a novel micro fabrication for formaldehyde gas sensors to enhance sensitivity and detection resolution capabilities. Therefore, two different types of fabrication sequences of gas sensors were considered, different positions of micro heaters and sensing layers to compare the effects of different areas of the sensing layers contact with the surrounding gas. The MEMS-based formaldehyde gas sensor consists of a quartz substrate, a thin-film NiO/Al₂O₃ sensing layer, an integrated Pt micro-hotplate, and Pt inter-digitized electrodes (IDEs) to measure the resistance variation of sensing layers caused by formaldehyde oxidation at the oxide surface. This abstract offers comparisons of the characteristics of sensors in different areas of the sensing layers contacting the surrounding gas as well as those to decrease the thickness of the sensing layer and deposits of the sensing layer using co-sputtering technology with NiO/Al₂O₃ to improve the sensitivity limits of the sensors. The experimental data indicated that increasing the area of the sensing layer that contacts with the surrounding gas and decreasing the thickness of the sensing layer in the sputtering process and then co-sputtered NiO/Al₂O₃ sensing layers, significantly enhanced the sensing characteristics of the developed formaldehyde sensor.     

Rapid prototyping of glass-based microfluidic chips utilizing two-pass defocused CO2 laser beam method

A method is proposed for the scribing of glass substrates utilizing a commercial CO₂ laser system. In the proposed approach, the substrate is placed on a hotplate and the microchannel is then ablated using two passes of a defocused laser beam. The aspect ratio and surface quality of the microchannels formed after the first and second laser passes are examined using scanning electron microscopy and atomic force microscopy. The observation results show that the second laser pass yields an effective reduction in the surface roughness. The practicality of the proposed approach is demonstrated by fabricating a microfluidic chip for formaldehyde concentration detection. It is shown that the detection results obtained for five Chinese herbs with formaldehyde concentrations ranging from 5 to 55 ppm deviate by no more than 5.5 % from those obtained using a commercial macroscale device. In other words, the results confirm that the proposed defocused ablation technique represents a viable solution for the rapid and low-cost fabrication of a wide variety of glass-based microfluidic chips.     

Electrophoresis separation and electrochemical detection on a novel thread-based microfluidic device

This paper describes a thread-based microfluidic system for rapid and low-cost electrophoresis separation and electrochemical (EC) detection of ion samples. Instead of using liquid channel for sample separation, thin polyester threads of various diameters are used as the routes for separating the samples with electrophoresis. Hot-pressed PMMA chip with protruding sleeper structures are adopted to set up the polyester threads and for electrochemical detection of the ion samples on the thread. Plasma treatment greatly improves the wetability of thin threads and surface quality of the threads. The measured electrical currents on plasma treated threads are 10 times greater than the threads without treatment. Results indicate that nice redox signals can be obtained by measuring ferric cyanide salt on the polyester thread. The estimated detection limit for EC sensing of potassium ferricyanide (K₃Fe(CN)₆) is around 6.25 μM using the developed thread-based microfluidic device. Mixed ion samples (Cl^?, Br^? and I^?) and bio-sample are successfully separated and detected using the developed thread-based microfluidic device.     

Elastic–plastic modeling of heat-treated bimorph micro-cantilevers

This paper models the residual stress distributions within micro-fabricated bimorph cantilevers of varying thickness. A contact model is introduced to calculate the influence of contact on the residual stress following a heat treatment process. An analytical modeling approach is adopted to characterize bimorph cantilevers composed of thin Au films deposited on thick poly-silicon or silicon-dioxide beams. A thermal elastic–plastic finite element model (FEM) is utilized to calculate the residual stress distribution across the cantilever cross-section and to determine the beam tip deflection following heat treatment. The influences of the beam material and thickness on the residual stress distribution and tip deflections are thoroughly investigated. The numerical results indicate that a larger beam thickness leads to a greater residual stress difference at the interface between the beam and the film. The residual stress established in the poly-silicon cantilever is greater than that induced in the silicon-dioxide cantilever. The results confirm the ability of the developed thermal elastic–plastic finite element contact model to predict the residual stress distributions within micro-fabricated cantilever structures with high accuracy. As such, the proposed model makes a valuable contribution to the development of micro-cantilevers for sensor and actuator applications.

     

An optimal three-dimensional focusing technique for micro-flow cytometers

This study presents a novel three-dimensional (3-D) hydrodynamic focusing technique for micro-flow cytometers. In the proposed approach, the sample stream is initially compressed in the horizontal direction by two sheath flows such that it is constrained in the central region of the microchannel. The sample stream is then focused in the vertical direction by a second pair of sheath flows and subsequently passes over a micro-weir structure positioned directly beneath an optical detection system. The microchannel configuration and operational parameters are optimized by performing a series of numerical simulations to examine the effects on the sample stream distribution of the vertical and horizontal focusing ratios, the entrance angle of the second set of sheath flow channels, and the width and depth of the second set of sheath flow channels. The results indicate that the horizontal and vertical sheath flows successfully constrain the sample stream within a narrow, well-defined region of the microchannel. Furthermore, the micro-weir structure results in the separation of the cells/particles in the vertical direction and ensures that they flow in a sequential fashion through the detection region of the microchannel and can therefore be reliably counted. It is shown that the 3-D focusing technique can achieve a focused sample stream width of between 6 and 15 μm given an appropriate value of the horizontal focusing ratio. Thus, the viability of the microflow cytometer for the counting and detection of individual biological cells is confirmed.     

Rapid glucose concentration detection utilizing disposable integrated microfluidic chip

A novel three-dimensional (3D) disposable glucose concentration detection chip is presented. The chip comprises a four-layer polymethyl methacrylate (PMMA) structure and is fabricated using a commercial CO₂ laser and a hot-press bonding technique. In the proposed device, the glucose solution is injected into a double parallel connection micromixer (DPCM) and is mixed with DNS reagent by means of a self-rotation effect. An experimental platform has been created for multiple reaction process by integrating chip and micro-heater. The fluid streams exiting the two circular mixing chambers of the DPCM are then combined and mixed further at a T-type microchannel outlet before passing to a collection chamber. Numerical simulations are performed to analyze the vortex streamline distribution within the DPCM and to estimate the mixing performance. The numerical results show that a mixing efficiency as high as 92.5% can be obtained at low Reynolds numbers (Re = 12). It is found a good linear relation of R ² = 0.9953 from the chip detection method comparing to the traditional method of R ² = 0.9976 at DNS reagent and glucose solution volume ratio of 1:1. In addition, the experimental results show that the accuracy of the glucose concentration measurements obtained using the proposed microfluidic chip is comparable with that of the measurements obtained using a conventional large-scale detection method. Overall, the results presented in this study indicate that the DPCM chip provides a rapid and low-cost means of detecting the concentration of glucose solutions.