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Pouliquen M. Denoual M. Jorel C. Radu C. Robbes D. Grand J. Awala H. Mintova S. Harnois M. Sagazan O. de Inoue S. Lebrasseur E. Yamada K. Okamoto Y. Mita-Tixier A. Mita Y. 《Microsystem Technologies》2022,28(6):1313-1319
Microsystem Technologies - We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure... 相似文献
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