Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. [1454].     

MEMS-Based Dual Axes Confocal Microendoscopy

We demonstrate a miniature, near-infrared microscope (λ = 785 nm) that uses a novel dual axes confocal architecture. Scalability is achieved with post-objective scanning, and a MEMS mirror provides real time (>4 Hz) in vivo imaging. This instrument can achieve sub-cellular resolution with deep tissue penetration and large field of view. An endoscope-compatible version can image digestive tract epithelium to guide tissue biopsy and monitor therapy.     

3-D Near-Infrared Fluorescence Imaging Using an MEMS-Based Miniature Dual-Axis Confocal Microscope

We demonstrate a fast miniature microelectro-mechanical-system-based near-infrared fluorescence dual-axis confocal microscope in a 10-mm-diameter package for 3-D imaging in both ex vivo and in vivo samples. The miniature microscope, while in contact with the targeted tissue, can reveal subsurface structure or anatomy as deep as 300 mum. The lateral and axial resolutions are 5 and 7 mum, respectively. Real-time en face mosaicing image of in vivo human skin is demonstrated to enlarge the overall FOV to be over 3 mm at acquisition frame rate of 5 frames/s.     

In vivo micro-image mosaicing

Recent advances in optical imaging have led to the development of miniature microscopes that can be brought to the patient for visualizing tissue structures in vivo. These devices have the potential to revolutionize health care by replacing tissue biopsy with in vivo pathology. One of the primary limitations of these microscopes, however, is that the constrained field of view can make image interpretation and navigation difficult. In this paper, we show that image mosaicing can be a powerful tool for widening the field of view and creating image maps of microanatomical structures. First, we present an efficient algorithm for pairwise image mosaicing that can be implemented in real time. Then, we address two of the main challenges associated with image mosaicing in medical applications: cumulative image registration errors and scene deformation. To deal with cumulative errors, we present a global alignment algorithm that draws upon techniques commonly used in probabilistic robotics. To accommodate scene deformation, we present a local alignment algorithm that incorporates deformable surface models into the mosaicing framework. These algorithms are demonstrated on image sequences acquired in vivo with various imaging devices including a hand-held dual-axes confocal microscope, a miniature two-photon microscope, and a commercially available confocal microendoscope.     

Angular vertical comb-driven tunable capacitor with high-tuning capabilities

This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.     

Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy

In this paper, we present a novel 2-D microelectromechanical systems (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution and long working distance, while also being well suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned vertical electrostatic combdrives. Maximum optical deflections of plusmn4.8deg and plusmn5.5deg are achieved in static mode for the outer and inner axes, respectively. Torsional resonant frequencies are at 500 Hz and 2.9 kHz for the outer and inner axes, respectively. The imaging capability of the MEMS scanner is successfully demonstrated in a breadboard setup. Reflectance images with a field of view of are achieved at 8 frames/s. The transverse resolutions are 3.94 mum and 6.68 mum for the horizontal and vertical dimensions, respectively.     

Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning

In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering /spl plusmn/6.0/spl deg/ two-dimensional area at resonant modes of 7.5 kHz, /spl plusmn/17 V for a fast-scanning mirror and 1.2 kHz, /spl plusmn/7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.     

Linearization of electrostatically actuated surface micromachined2-D optical scanner

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two-dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projected images from 72% to only 13%. A theoretical model has been developed to predict the angle-voltage transfer characteristics of the 2-D scanner. The simulation results agree very well with experimental data. Differential voltage operation has been found to suppress the crosstalk of two orthogonal scan axes by both experiment and theoretically. We have found that a circular mirror is expected to have the lowest angular distortion compared with square mirrors. Perfect grid scanning pattern of small distortion (0.33%) has been successfully obtained by predistorting the driving voltages after calibration