VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling

This work, the first of two parts, presents the design and modeling of VHF single-crystal silicon (SCS) capacitive disk resonators operating in their elliptical bulk resonant mode. The disk resonators are modeled as circular thin-plates with free edge. A comprehensive derivation of the mode shapes and resonant frequencies of the in-plane vibrations of the disk structures is described using the two-dimensional (2-D) elastic theory. An equivalent mechanical model is extracted from the elliptic bulk-mode shape to predict the dynamic behavior of the disk resonators. Based on the mechanical model, the electromechanical coupling and equivalent electrical circuit parameters of the disk resonators are derived. Several considerations regarding the operation, performance, and temperature coefficient of frequency of these devices are further discussed. This model is verified in part II of this paper, which describes the implementation and characterization of the SCS capacitive disk resonators.     

VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization

This work, the second of two parts, reports on the implementation and characterization of high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The resonators are fabricated on SOI substrates using a HARPSS-based fabrication process and are 3 to 18 /spl mu/m thick. They consist of a single crystal silicon resonant disk structure and trench-refilled polysilicon drive and sense electrodes. The fabricated resonators have self-aligned, ultra-narrow capacitive gaps in the order of 100 nm. Quality factors of up to 46 000 in 100 mTorr vacuum and 26000 at atmospheric pressure are exhibited by 18 /spl mu/m thick SCS disk resonators of 30 /spl mu/m in diameter, operating in their elliptical bulk-mode at /spl sim/150 MHz. Motional resistance as low as 43.3 k/spl Omega/ was measured for an 18-/spl mu/m-thick resonator with 160 nm capacitive gaps at 149.3 MHz. The measured electrostatic frequency tuning of a 3-/spl mu/m-thick device with 120 nm capacitive gaps shows a tuning slope of -2.6 ppm/V. The temperature coefficient of frequency for this resonator is also measured to be -26 ppm//spl deg/C in the temperature range from 20 to 150/spl deg/C. The measurement results coincide with the electromechanical modeling presented in Part I.     

High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps

This paper reports on the fabrication and characterization of high-quality factor (Q) single crystal silicon (SCS) in-plane capacitive beam resonators with sub-100 nm to submicron transduction gaps using the HARPSS process. The resonating element is made of single crystal silicon while the drive and sense electrodes are made of trench-refilled polysilicon, yielding an all-silicon capacitive microresonator. The fabricated SCS resonators are 20-40 /spl mu/m thick and have self-aligned capacitive gaps. Vertical gaps as small as 80 nm in between 20 /spl mu/m thick silicon structures have been demonstrated in this work. A large number of clamped-free and clamped-clamped beam resonators were fabricated. Quality factors as high as 177000 for a 19 kHz clamped-free beam and 74000 for an 80 kHz clamped-clamped beam were measured under 1 mtorr vacuum. Clamped-clamped beam resonators were operated at their higher resonance modes (up to the fifth mode); a resonance frequency of 12 MHz was observed for the fifth mode of a clamped-clamped beam with the fundamental mode frequency of 0.91 MHz. Electrostatic tuning characteristics of the resonators have been measured and compared to the theoretical values. The measured Q values of the clamped-clamped beam resonators are within 20% of the fundamental thermoelastic damping limits (Q/sub TED/) obtained from finite element analysis.     

Investigation of Heat Source Models and Process Factors on Temperature and Residual Stress in GTAW of Aluminum Plates

Russian Journal of Non-Ferrous Metals - Heat source modeling is one of the most important problems in welding simulation and has a significant impact on temperature and residual stress fields. This...     

Fracture analysis on flexible roll forming process of anisotropic Al6061 using ductile fracture criteria and FLD

In this research, the fracture phenomenon was investigated on flexible roll forming process of channel section using ductile fracture criteria and forming limit diagram (FLD) by considering the effect of anisotropy. For this purpose, a finite element simulation of the process using the ABAQUS software was done. The fracture in this process was evaluated by considering six types of ductile fracture criteria by UMAT subroutine implementation on the FEM software and using FLD criterion. Experimental tests were performed on 27 blanks of Al6061-T6 using flexible roll forming machine made in Shahid Rajaee Teacher Training University (SRTTU). Numerical results were validated by experimental results. In addition, prediction of occurrence and fracture position by ductile fracture criteria and FLD criterion were compared with experimental results; the Argon criterion was chosen as the most appropriate criterion to predict the fracture position and its occurrence. The fracture occurrence was only observed in a 60° bending angle for 1.5- and 2-mm thicknesses, and the fracture position error percentages of the Argon criterion with experiments for these cases were 18.7 and 3.5%, respectively. Also, the effects of parameters such as sheet thickness, bending radius, and bending angle on the fracture phenomenon by using the selected criterion of Argon were studied.     

A Study on the Charpy Impact Response of the Cracked Aluminum Plates Repaired with FML Composite Patches

Fiber metal laminates (FMLs) are widely used in aerospace industries nowadays. Reparation of the cracks in these advanced materials was first done by some aeronautical laboratories in the early 1970s. In this study, experimental investigations were done on the effects of repairing the edge-cracked aluminum plates using the FML patches. The repairing processes were conducted to characterize the response of the repaired structures to the Charpy impact tests. The composite patches were made of one aluminum layer and two woven glass–epoxy composite layers. Three different crack lengths, crack angles, and patch lay-ups were examined. It was indicated that for the lengthen cracks, the effect of increasing the crack angle on energy absorption in the structure was more. When the ratio of crack length to the specimen width, i.e., a/w, is 0.5, the energy absorption per unit area of the specimens having different crack angles but the same patch lay-ups was so different. It was also observed that the percentage of the absorbed energy of 45° cracked angle specimens was about 25% higher than the 0° ones. Also it was observed that the lay-up of the patches and the place where the metal layer was embedded in the FML patches had an important effect on the impact response of the tested specimens. The more the metal layer of the patches is far from the interfacial surface of the aluminum plate and the FML patches, the less the energy absorbs in the structure.