Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

A stochastic realization algorithm via block LQ decomposition in Hilbert space

A stochastic realization problem of a stationary stochastic process is re-visited, and a new stochastically balanced realization algorithm is derived in a Hilbert space generated by second-order stationary processes. The present algorithm computes a stochastically balanced realization by means of the singular value decomposition of a weighted block Hankel matrix derived by a “block LQ decomposition”. Extension to a stochastic subspace identification method explains how the proposed abstract algorithm is implemented in system identification.     

Pedestrian detection and tracking at crossroads

This paper presents a system that can perform pedestrian detection and tracking using vision-based techniques. A very important issue in the field of intelligent transportation system is to prevent pedestrians from being hit by vehicles. Recently, a great number of vision-based techniques have been proposed for this purpose. In this paper, we propose a vision-based method, which combines the use of a pedestrian model as well as the walking rhythm of pedestrians to detect and track walking pedestrians. Through integrating some spatial and temporal information grabbed by a vision system, we are able to develop a reliable system that can be used to prevent traffic accidents happened at crossroads. In addition, the proposed system can deal with the occlusion problem. Experimental results obtained by executing some real world cases have demonstrated that the proposed system is indeed superb.     

An immune oriented multi-agent system for biological image processing

In this article, we present a parallel image processing system based on the concept of reactive agents. Our system lies in the oRis language, which allows to describe finely and simply the agents’ behaviors to detect image features. We also present a method of segmentation using a multi-agent system, and two biological applications made with oRis. The stopping of this multi-agent system is implemented through a technique issued from immunology: the apoptosis.     

A global output-feedback controller for stabilization and tracking of underactuated ODIN: A spherical underwater vehicle

This paper presents a method to design an output-feedback controller that simultaneously solves global asymptotic stabilization and tracking of an underactuated omni-directional intelligent navigator—a spherical underwater vehicle moving in a horizontal plane (i.e. at a constant depth). The vehicle does not have a sway actuator and has only position and orientation measurements available. The control development is based on Lyapunov's direct method, backstepping technique and use of interconnected structure of the vehicle dynamics. Numerical simulations demonstrate the results.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Position synchronization of multiple motion axes with adaptive coupling control

A new control approach to position synchronization of multiple motion axes is developed, by incorporating cross-coupling technology into adaptive control architecture. The control strategy is to stabilize position tracking of each axis while synchronizing its motion with other axes’ motions so that differential position errors amongst axes converge to zero. The proposed adaptive controller and parameter estimator employ coupling control by feeding back position errors and differential position errors, and have been realized to guarantee asymptotic convergence to zero of both position and synchronization errors. Simulations conducted on a multi-axis motion control system demonstrate the effectiveness of the method.