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Benzocyclobutene (BCB) is a thermosetting polymer that can form microfluidics and bond top and bottom layers of the microfluidics
at the same time, and yields high repeatability and high bonding strength. This paper reports using photosensitive BCB to
fabricate microfluidics and to bond with a thermal press for 4 in. wafers. By optimizing the parameters for pattern development
and using a three-stage temperature and pressure increment BCB bonding, we realize the whole wafer glass–Si or glass–glass
bonding in thermal press without any crack. The wafer-level bonding shows a bonding percentage above 70%, a tensile stress
above 4.94 MPa, and a bonding repeatability over 95%. Furthermore, the bonding is compatible with thick electrode integration,
that microfluidics with 380 nm thick electrodes underneath can be well-bonded. Our bonding method much reduces the cost compared
with bonding BCB in a wafer bonding machine.
Electronic supplementary material The online version of this article (doi:) contains supplementary material, which is available to authorized users. 相似文献
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Selven Rungiah Renukarn Ruamsuk Philippe Vroman Wataru Takarada Jean‐Christophe Appert‐Collin Takeshi Kikutani 《应用聚合物科学杂志》2017,134(14)
The bicomponent meltblown process offers to associate two polymers in the same fiber generating fibrous media with new properties. In this study, we associate polypropylene (PP) and poly(lactic acid) (PLA), from renewable sources, polymers. The influence of primary air flow rate and the structural properties of the PP/PLA bicomponent meltblown are compared to PP and PLA monocomponent meltblown. The structural properties include fiber morphology and diameter, packing density, permeability, thermal shrinkage and crystallization. The results relate that the PP/PLA bicomponent meltblown fiber diameters are thinner than those of PLA monocomponent. Moreover, it has higher resistance to thermal shrinkage compared to PP monocomponent meltblown. The packing density and permeability are not affected by the association of PP and PLA due to low crimp effect. Two different filament formations of PP/PLA bicomponent meltblown at low and high primary air flow rate have also been observed. Lastly, this study illustrates that PP and PLA association is viable, showing the production of PP/PLA bicomponent microfiber and limited thermal shrinkage at high temperature. © 2016 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2017 , 134, 44540. 相似文献
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