Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Adaptive motion control using neural network approximations

In this paper, we present a new adaptive technique for tracking control of mechanical systems in the presence of friction and periodic disturbances. Radial Basis Functions (RBFs) are used to compensate for the effects of nonlinearly occurring parameters in the friction and periodic disturbance model. Theoretical analysis, such as stability and transient performance, is provided. Furthermore, the performance of the adaptive RBF controller and its non-adaptive counterpart are compared.     

A micromechanical model for cleavage-crack reinitiation

A crack-tip screening analysis of cleavage fracture of steel is developed. The analysis incorporates evidence that reinitiation of an arrested cleavage crack requires less stress intensity than cleavage initiation from a fatigue precrack. Fractographic evidence as well as metallographic sectioning of arrested cracks have previously shown that the mechanism of rapid crack propagation by cleavage is affected strongly by partial crack-plane deflection which leaves unbroken ligaments in its wake. The tearing of these ligaments by dimple rupture is the dominant energy-absorbing mechanism. Earlier etch-pit experiments using an Fe-Si alloy showed that the crack-tip stress intensity based on plastic zone size is extremely low. These observations are incorporated into a model in which cleavage crack reinitiation is analyzed using a sharp crack that is shielded by a distribution of pinching forces along its faces. During reloading of the arrested crack, the ligaments restrict crack-tip blunting, leading to higher local stresses. As a result, lower stress intensities are needed for reinitiation than for initiation from a fatigue precrack.     

Optimized species growth in epoxy polymerization with real-coded NSGA-II

Satisfaction of twin objectives of maximization of M_n along with minimization of PDI do not necessarily guarantee the maximization of concentration of desired species in a semibatch epoxy polymerization process. As the final product consists of a number of polymer species, a need is felt to perform an advanced optimization study to come up with such process conditions for which the selective growth of a particular polymer species is maximized in minimum possible processing time and the population of other species should be at their lowest values. These above-mentioned conflicting objectives frame the platform for a multi-objective optimization problem, which is solved here using a real-coded non-dominated sorting genetic algorithm or NSGA II and Pareto optimal solutions are obtained. The decision variables are discrete addition rates of various ingredients, e.g. the amount of addition of bisphenol-A (a monomer), sodium hydroxide and epichlorohydrin at different time steps. All species balance equations, bounds on M_n, PDI and addition amounts are treated as constraints. Results are very promising in terms of optimized operations for selective enhancement of desired polymer species for the epoxy polymerization process. Total additions are kept very close to available experimental conditions to minimize probable extrapolation errors. It has been observed that preferential oligomer production is extremely difficult for epoxy polymerization. Lower chain polymers are the only choice for a good quality, stable polymer product.     

Topology preservation of template-based 6-subiteration reduction operations

Generally, a reduction operation (e.g., thinning and shrinking) on 3D binary images can be represented as a set of reduction templates where every object voxel of the image satisfying any template is turned to a background voxel. Generally, it is rather difficult, error-prone and time-consuming for verifying the topological soundness of a 3D parallel reduction operation. This paper proposes sufficient conditions of time complexity O(n) for verifying the topological soundness of 3D parallel 6-subiteration reduction operations of n templates where such a kind of 3D reduction operations is performed alternatively from the six orthogonal directions to turn object voxels to background voxels. By such sufficient conditions, the topology soundness of a 3D 6-subiteration parallel reduction operation can be verified by checking each and every of its templates.     

Control of discrete time nonlinear systems with a time-varying structure

In this paper, we present a control methodology for a class of discrete time nonlinear systems that depend on a possibly exogenous scheduling variable. This class of systems consists of an interpolation of nonlinear dynamic equations in strict feedback form, and it may represent systems with a time-varying nonlinear structure. Moreover, this class of systems is able to represent some cases of gain scheduling control, Takagi-Sugeno fuzzy systems, as well as input-output realizations of nonlinear systems which are approximated via localized linearizations. We present two control theorems, one using what we call a “global” approach (akin to traditional backstepping), and a “local” approach, our main result, where backstepping is again used but the control law is an interpolation of local control terms. An aircraft wing rock regulation problem with varying angle of attack is used to illustrate and compare the two approaches.     

Stability robustness of networked control systems with respect to packet loss

This paper is concerned with stability analysis of discrete-time networked control systems over a communication channel subject to packet loss whose behavior is modeled by an i.i.d Bernoulli process with a packet dropping probability bounded by a constant. A necessary and sufficient condition for stability is obtained. A packet dropping margin is introduced as a measure of stability robustness of a system against packet dropping, and a formula for it is derived. A design method is proposed for achieving a large margin subject to a constraint that the system has a set of prescribed nominal closed-loop poles.