Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

Nonlinear Optical Properties of TeO2-Based Glasses: MOx-TeO2 (M = Sc, Ti, V, Nb, Mo, Ta, and W) Binary Glasses

The third-order nonlinear optical susceptibilities, X⁽³⁾, of TeO₂-based glasses containing transition metal oxides (M = Sc₂O₃, TiO₂, V₂O₅, Nb₂O₅, MoO₃, Ta₂O₅, and WO₃) glasses have been measured by the third harmonic generation (THG) method in order to investigate the effect of the empty d-orbital contributions to the third-order nonlinear optical susceptibilities. It is found that the addition of TiO₂, Nb₂O₅, and WO₃ to TeO₂ glass increases the X⁽³⁾ value as well as the refractive index, while others decrease both of them. The positive effect of the TiO₂, Nb₂O₅, or WO₃, on the X⁽³⁾ of TeO₂ glass was interpreted in terms of the cationic empty d-orbital contribution. There is an almost linear relation between the X⁽³⁾ and the term (n²_ω+ 2)³.(n²_ω -1).E_d/E²₀ containing three measurable parameters only, irrespective of the kinds of MO, which was derived based on the bond orbital theory developed by M. E. Lines. The largest X⁽³⁾ value obtained is 1.69 × 10⁻¹² esu for 30NbO_2.5.70TeO₂ glass, about 60 times larger than that of pure fused silica glass.     

Permeation of Zidovudine and Probenecid from Oily Bases Containing Alcohols Through Rat Skin

Permeation of zidovudine (3'-azido-3'-deoxythymidine, AZT) and probenecid from oily bases containing an alcohol through rat skin was examined. Isopropyl myristate (IPM), as an oily vehicle, showed a penetration enhancing effect for AZT and probenecid. Ethanol, n-propanol, and n-butanol were used as additives in IPM and were examined for their own permeation and the enhancing effect on the permeation of AZT and probenecid. The skin permeation of AZT and probenecid from IPM was enhanced by addition of the alcohol in IPM. The degree of the enhancement was decreased with increasing lipophilicity of the alcohol used. me permeation rate of the drug from those systems was shown to be governed by penetration-enhancing effects of the oily base and alcohol, and the penetration of the alcohol itself through the skin.     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.