Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

On regional nonlinear H-filtering

The structure of the nonlinear H^∞-filter in the neighborhood of the estimated trajectory is investigated and a bound on the size of the neighborhood that allows this structure is determined, both for finite and infinite horizons. Riccati inequalities that depend on the estimated trajectory are derived for finding the filter gain matrix and an algorithm for calculating the bound on the size of the above neighborhood is presented. Explicit formulas are obtained in the infinite horizon case for the minimum achievable disturbance attenuation level, the size of the neighborhood, and the corresponding filter gain.     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.     

Hardware and software architecture for power quality analysis

This paper presents a novel concept for power quality hardware and software architecture. Software tools related to detection, classification and characterization of power quality events can be integrated into a Distribution Control Center in which the interconnection between different subsystems is being carried out through the Internet allowing flexibility to the system. This system is implemented using wavelet analysis applied in all proposed algorithms. Different power quality events are taken as examples to illustrate the capabilities of the proposed method. The obtained results reveal that the proposed architecture is feasible to be implemented as an integral part of a control center system.The proposed system has the property of fast and accurate detection and classification of any power quality disturbance event and introduces a new PQ index determination that allows characterizing any type of disturbance including the non-periodic signals.