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A hybrid micro-electrostatic actuator is presented. The actuator integrates a vertical comb driving (VCD) unit and a parallel-plate driving (PPD) unit. The hybrid actuator is fabricated using a one structural layer microfabrication process, i.e., MetalMUMPs instead of a two-layer microfabrication process needed for traditional vertical comb-drive actuators by taking advantage of the residual stress gradient in the MetalMUMPs nickel layer, which raises the moving parts of the actuator above the substrate after release. The hybrid actuator significantly simplifies the fabrication process for vertical comb-drive actuators, i.e., turning a process requiring two structural layers into a process requiring only one structural layer and thus avoids any misalignment between the two layers. The hybrid actuator can generate larger force and then a larger displacement than the actuator having only the VCD with the same area since no extra space is needed for the PPD unit which uses the moving electrode existing in the VCD unit and a fixed electrode under the VCD unit. The VCD and PPD units in the hybrid actuator are subject to the same driving voltage and work together to pull the moving parts of the actuator downward. A model is established for the hybrid actuator to analyze its displacement. The analytical results show that displacement of the moving part of the hybrid actuator is about half of the gap between the electrodes of the PPD unit. Prototypes are fabricated and tested. With a driving voltage of 150 V, the hybrid actuator achieved a measured displacement of 6.48 µm. 相似文献
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基于.NET远程处理的仿真控制平台实现研究 总被引:2,自引:0,他引:2
基于HLA仿真体系标准的仿真系统在数据交互上必须实现RTI所符合的标准,但是RTI仅仅定义了仿真系统运行时所涉及到的标准,未定义仿真在发起之前系统各组成部分之间的数据通信实现方法。采用.NET体系结构新的远程处理系统框架,该文提出了用于实现仿真初始化以及仿真控制的演练管理系统原型的方法。 相似文献
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Rational Design and Synthesis of γFe2O3@Au Magnetic Gold Nanoflowers for Efficient Cancer Theranostics
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Hailu Liu Xuejia Ding Jun Yi Liqun Zhang Sizhu Wu 《Frontiers of Chemical Engineering in China》2010,4(3):257-262
In this research, molecular dynamics (MD) simulations were used to study the transport properties of small gas molecules in
the butadiene-styrene copolymer (SBR). The condensed-phase optimized molecular potentials for atomistic simulation studies
(COMPASS) force field was applied. The diffusion coefficients were obtained from MD (NVT ensemble) and the relationship between
gas permeability; the chemical structure and free volume of butadiene-styrene copolymer were investigated. The results indicated
that the diffusion coefficient of oxygen declined with increasing styrene content. The fraction of free volume (FFV) in butadiene-styrene
copolymer was calculated. It was concluded that diffusion coefficient increased as the FFV increases, which is in accordance
with the analysis of the small molecular hop through the free volume in polymer matrix. Subsequently, the glass transition
temperatures of these copolymers were calculated by MD. The result showed that the glass transition temperature increased
with increasing styrene content in polymer. 相似文献
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Wanling Shen Jun Yang Shenhui Li Wei Hu Jun Xu Hailu Zhang Qin Zou Lei Chen Feng Deng 《Microporous and mesoporous materials》2010,127(1-2):73-81
The phase transition process from a hexagonal to a lamellar mesostructured aluminophosphate was studied by multinuclear solid-state NMR techniques in combination with low-angle XRD and elemental analysis measurements. The XRD result showed that after hydrothermal treatment for 9 h, the initial hexagonal phase began to transform to a lamellar phase. It was also found by NMR that some initially formed aluminophosphate was hydrolyzed during the earliest 2 h of the hydrothermal treatment, and the inorganic aluminophosphate framework became more and more condensed during the phase transition. The organic surfactant mainly has a gauche conformation in the hexagonal phase, whereas it mainly has a trans conformation in the lamellar phase and is packed more compactly. The Br? anion is found to be involved in the phase transition and likely enters into the interface to compensate the lost of negative charges that generated by the condensation of the aluminophosphate. Finally, a mechanism for the phase transition is proposed. 相似文献