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该文基于掺钪AlN薄膜制备了高次谐波体声波谐振器(HBAR),研究了钪(Sc)掺杂浓度对AlN压电薄膜材料特性及器件性能的影响。研究表明,当掺入Sc的摩尔分数从0增加到25%时,压电应力系数e33增加、刚度 下降,导致Al1-xScxN压电薄膜的机电耦合系数 从5.6%提升至15.8%,从而使HBAR器件的有效机电耦合系数 提升了3倍。同时,当Sc掺杂摩尔分数达25%时,Al1-xScxN(x为Sc掺杂摩尔分数)压电薄膜的声速下降13%,声学损耗提高,导致HBAR器件的谐振频率和品质因数降低。 相似文献
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Yan Xiong Xianwu Du Mingyu Xiang Hao Wang Weimin Wang Zhengyi Fu 《Journal of the European Ceramic Society》2018,38(12):4167-4172
The densification behaviors of pure B4C and B4C-ZrO2 mixtures were compared during hot pressing. The results showed that in-situ formed ZrB2 effectively enhanced the densification process of B4C-ZrO2 mixtures, more significantly during the intermediate stage. Within the relative density ranging from 0.75 to 0.90, the B4C-15?wt%ZrO2 mixture (B15Z) achieved the maximum densification rate as twice much as that of pure B4C. The stress exponent n>3 indicated plastic deformation was the dominant densification mechanism of B15Z. The viscosities of plastic flow were evaluated using Murray-Rodger-William equation and the viscosity of B15Z was only a quarter of that in pure B4C. The sintering activation energy was calculated to be 305.9?kJ/mol for pure B4C and 197?kJ/mol for B15Z, respectively. It was proposed that the lower viscosity of plastic flow and activation energy accelerated the sliding and propagating motions of plastic flow, by which underlain the enhanced densification behaviors of B4C-ZrO2 mixtures. 相似文献
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Functional expression and synergistic cooperation of xylan‐degrading enzymes from Hypocrea orientalis and Aspergillus niger
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Shouguang Wang Mengdi Gan Mengchu Zhou Dan You 《IEEE/CAA Journal of Automatica Sinica》2015,2(4):345-352
As a powerful analysis tool of Petri nets, reachability trees are fundamental for systematically investigating many characteristics such as boundedness, liveness and reversibility. This work proposes a method to generate a reachability tree, called ωRT for short, for a class of unbounded generalized nets called ω-independent nets based on new modified reachability trees (NMRTs). ωRT can effectively decrease the number of nodes by removing duplicate and ω-duplicate nodes in the tree, and verify properties such as reachability, liveness and deadlocks. Two examples are provided to show its superiority over NMRTs in terms of tree size. 相似文献
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Qianglong He Aiyang Wang Chun Liu Weimin Wang Hao Wang Zhengyi Fu 《Journal of the European Ceramic Society》2018,38(7):2832-2840
B4C-TiB2-SiC composites were fabricated via hot pressing using ball milled B4C, TiB2, and SiC powder mixtures as the starting materials. The impact of ball milling on the densification behaviors, mechanical properties, and microstructures of the ceramic composites were investigated. The results showed that the refinement of the powder mixtures and the removal of the oxide impurities played an important role in the improvement of densification and properties. Moreover, the formation of the liquid phases during the sintering was deemed beneficial for densification. The typical values of relative density, hardness, bending strength, and fracture toughness of the composites reached 99.20%, 32.84?GPa, 858?MPa and 8.21?MPa?m1/2, respectively. Crack deflection, crack bridging, crack branching, and microcracking were considered to be the potential toughening mechanisms in the composites. Furthermore, numerous nano-sized intergranular/intragranular phases and twin structures were observed in the B4C-TiB2-SiC composite. 相似文献
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<正>第十一章离子液体在分离过程中的应用(上接第2006年第5期) 5.2有机/生物/生物燃料分子的离子液体萃取由于带电有机物在离子液体中的高溶解性,促进了离子液体回收有机物的发展。如表11-7所示,在IL-H_2O两相体系中进行了一些取代苯衍生物的相分配研究。 相似文献