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Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS. 相似文献
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传统车床方刀架在使用中经常出现偏移现象,存在小滑板上销孔套筒磨损过大的问题,影响了加工精度,降低了工作效率。以CA6140车床为例,经研究分析,其销孔套筒的材料为45号钢,按传统热处理方式对其进行处理后耐磨度不够。探讨了采用现代表面处理工艺强化45号钢耐磨性能的可行性,并对实际生产中车床方刀架的故障进行了处理。 相似文献
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车床跟刀架是径向支撑旋转工件的辅助装置,加工时,与刀具一起沿工件轴向移动。针对某车间现有传统车床跟刀架支承爪磨损严重的问题,借用滚动轴承改进设计了一种新型跟刀架,利用滚动摩擦代替滑动摩擦。经实践检验,该方法效果良好,有效地解决了支承爪的磨损问题。 相似文献
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现有某车间车床CA6140尾座体底面上的凹形导轨槽与尾座垫板上的凸形导轨配合部位锥面磨损,间隙过大,导致加工精度下降。尾座材料为灰铸铁,本文以HT200为试验材料,通过分别采用高频淬火处理与预热后再淬火处理来探讨对其磨损性能的影响,得出结论两种处理均能提高灰铸铁的耐磨性能,而后者对灰铸铁耐磨性能的提高更为显著。 相似文献