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1.
A systemic process study on an electron beam nanolithography system operating at 100 kV was present. The exposure conditions
were optimized for resist ZEP520A. Grating structures with line/space of 50 nm/50 nm were obtained in a reasonably thick resist
which is beneficial to the subsequent pattern transfer technique. The ICP etching process conditions was optimized. The role
of etching parameters such as source power, gas pressure, and gas flow rate on the etching result was also discussed. A grating
structure with line widths as small as 100 nm, duty cycles of 0.5, depth of 900 nm, and the side-wall scalloping as small
as 5 nm on a silicon substrate was obtained. The silicon deep etching technique for structure sizes smaller than 100 nm is
very important for the fabrication of nano-optical devices working in the visible regime.
Supported by the National Basic Research Program of China (“973” Program) (Grant No. 2007CB935301) 相似文献
2.
This paper presents a Lyapunov-based approach to design the boundary feedback control for an openchannel network composed
of a cascade of multi-reach canals, each described by a pair of Saint-Venant equations. The weighted sum of entropies of the
multi-reaches is adopted to construct the Lyapunov function. The time derivative of the Lyapunov function is expressed by
the water depth variations at the gate boundaries, based on which a class of boundary feedback controllers is presented to
guarantee the local asymptotic closed-loop stability. The advantage of this approach is that only the water level depths at
the gate boundaries are measured as the feedback.
Supported by the National Natural Science Foundation of China (Grant Nos. 60504026, 60674041), and the National High-Tech
Research & Development Program of China (Grant No. 2006AA04Z173) 相似文献
3.
随着网络的不断发展,跨层设计越来越多的受到了关注。本文首先介绍了传统网络层次的缺陷和跨层设计在下一代网络中的重要性,然后阐述了目前此项研究中已有的跨层设计方法,最后对各种方法的优缺点进行总结和比较并提出了跨层设计的难度和待解决的问题。 相似文献
4.
In this paper,we provide a unified expression to obtain the conditions on the restricted isometry constantδ2s(Φ).These conditions cover the important results proposed by Candes et al.and each of them is a sufficient condition for sparse signal recovery.In the noiseless case,whenδ2s(Φ)satisfies any one of these conditions,the s-sparse signal can be exactly recovered via(l1)constrained minimization. 相似文献
5.
对不同时效制度下7055铝合金微观组织演变及强度变化规律进行研究,利用光学显微镜(OM)、透射电镜(TEM)对微观组织进行观察分析,并进行了力学性能测试。结果表明,时效温度为120℃时,屈服强度和抗拉强度均呈现单调增加的趋势,且初期升高速率极快,后续变得平缓,40 h后达到峰值强度;时效温度为160℃时,屈服强度与抗拉强度首先急剧升高,10 h后达到峰值强度,随后均呈现明显的降低趋势;人工时效初期,首先生成与基体完全共格的原子团簇及GP区,随后晶内出现过渡η'相,直至演变为过时效状态下的平衡η相。 相似文献
6.
Based on the composite material mechanic theory,the analysis method for the equivalent elastic moduli which are parallel and vertical to the construction interface of RCCD is studied in this paper.The differences between the equivalent elastic moduli which are vertical to the construction interface of RCCD gotten from different methods are discussed in detail.The variation range of the equivalent elastic modulus which is vertical to the construction interface of RCCD is studied based on the principle of minimum complementary energy and the principle of minimum potential energy.The effect of the related influential factors on the equivalent elastic modulus is analyzed.The estimation formula of the equivalent modulus which is vertical to the construction interface of RCCD is proposed.The feasibility of the approach proposed in this paper is analyzed through an example. 相似文献
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8.
Shengyin ZhouRui Hu Jinshan LiHui Chang Hongchao KouLian Zhou 《Materials Science and Engineering: A》2011,528(3):973-977
Substantial undercooling ΔT up to 415 K was achieved for Co80Pd20 melt applying molten glass denucleation combined with cyclic superheating. The as-solidified structure as function of ΔT was described concisely. On this basis, dense-regular fault (DRF) ribbons were detected provided if a critical undercooling is surpassed. An integrated analysis of the DRF formation with a model calculation [16] for shrinkage-stress developed in the coherent dendrite network upon rapid solidification was then performed. This confirms that the as-formed DRF originates from a stress-induced deformation, which also plays an important role in understanding the grain refinement occurring upon rapid solidification of undercooled melts. 相似文献
9.
该烘炉是在中国专利技术“单种热源远红外辐射对流复合烘炉”基础上进行完备的热力工程设计,配以创新的特殊储热储能结构、先进防爆技术而成。整套STD控制系统中包括了易燃气体浓度监测、光声报警及自动保护以及炉温、炉内压力和烘干程度的自动检测及控制。系统在河南南阳防爆电机厂的长期使用表明,可以提高工效4-5倍,节能效果显著,同时提高了产品质量。 相似文献
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