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选择普通房式仓进行内部环流工艺设计 ,从中探索了内部环流管道的布局方式 ,选材 ,环流熏蒸杀虫效果 ,经济、社会效益情况及推广应用价值等 . 相似文献
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Amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) back-plane technology is the best candidate for flat panel displays (FPDs).In this paper,a-IGZO TFT structures are described.The effects of etch parameters (rf power,dc-bias voltage and gas pres-sure) on the etch rate and etch profile are discussed.Three kinds of gas mixtures are compared in the dry etching process of a-IGZO thin films.Lastly,three problems are pointed out that need to be addressed in the dry etching process of a-IGZO TFTs. 相似文献
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