Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process

We have developed an InAlAs/InGaAs metamorphic high electron mobility transistor device fabrication process where the gate length can be tuned within the range of 0.13 μm–0.16 μm to suit the intended application. The core processes are a two-step electron-beam lithography process using a three-layer resist and gate recess etching process using citric acid. An electron-beam lithography process was developed to fabricate a T-shaped gate electrode with a fine gate foot and a relatively large gate head. This was realized through the use of three-layered resist and two-step electron beam exposure and development. Citric acid-based gate recess etching is a wet etching, so it is very important to secure etching uniformity and process reproducibility. The device layout was designed by considering the electrochemical reaction involved in recess etching, and a reproducible gate recess etching process was developed by finding optimized etching conditions. Using the developed gate electrode process technology, we were able to successfully manufacture various monolithic microwave integrated circuits, including low noise amplifiers that can be used in the 28 GHz to 94 GHz frequency range.     

Practical considerations of Si-based anodes for lithium-ion battery applications

Using Si-based anodes in Li-ion batteries is one of the most feasible approaches to achieve high energy densities despite their disadvantages, such as low conductivity and massive volume expansion, which cause unstable solid electrolyte interphase layers with mechanical failure. The forefront in research and development to address the above challenges suggests the possibility of fully commercially viable cells using various structural and interfacial modifications. In particular, we present a discussion of each dimension of Si-based anodes in multiple controlled systems, including plain, hollow, porous, and uniquely engineered structures, which are further evaluated based on their anode performances, such as initial reversibility, capacity retention for extended cycles with its efficiency, degree of volume expansion tolerance, and rate capabilities, by several practical standards in half cells. With these practical considerations, multi-dimensional structures with uniform size distributions (micrometers, on average) are strongly desired to satisfy the rigorous requirements for widespread applications. Furthermore, we closely examined several full cells composed of Si-based multicomponent anodes coupled with suitable cathodes based on practical standards to propose future research directions for Si-based anodes to keep pace with the rapidly changing market demands for diverse energy storage systems.

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Indium gallium zinc oxide (IGZO)-based Ohmic contact formation on n-type gallium antimony (GaSb)

In this paper, Ohmic-like contact on n-type GaSb with on/off-current ratio of 1.64 is presented, which is formed at 500 °C by inserting IGZO between metal (Ni) and GaSb. The resulting Ohmic contact is systematically investigated by TOF-SIMS, HSC chemistry simulation, XPS, TEM, AFM, and J–V measurements. Two main factors contributing to the Ohmic contact formation are (1) InSb (or InGaSb) with narrow energy bandgap (providing low electron and hole barrier heights) formed by In diffusion from IGZO and Sb released by Ga oxidation, and (2) free Sb working as traps that induces tunneling current.     

Mechanism for the degradation of MmNi<Subscript>3.9</Subscript>Co<Subscript>0.6</Subscript>Mn<Subscript>0.3</Subscript>Al<Subscript>0.2</Subscript> electrode and effects of additives on electrode degradation for Ni-MH secondary batteries

Electrode degradation can affect the lifetime and safety of Ni-MH secondary batteries. This study examined the factors responsible for the degradation of metal hydride (MH) electrodes. The charge-discharge characteristics and cycle life of an MmNi_3.9Co_0.6Mn_0.3Al_0.2 (Mm: misch metal) type MH electrode were examined in a cell with a KOH electrolyte. After the charge-discharge cycles, the surface morphology of the electrodes was analyzed to monitor the extent of degradation. Electrochemical impedance spectroscopy provided information on the conductivity of the electrode. X-ray photon spectroscopy (XPS) was used to quantify the degradation of the electrode in terms of its composition. The MH electrodes degraded with cycling. This phenomenon was more prominent at higher C-rates and temperatures. The electrode degradation was attributed to the loss of active material from the current collector by the repeated absorption and desorption of hydrogen and the formation of an Al₂O₃ oxide layer on the electrode surface with cycling. In addition, the effects of the addition of Co nano and Y₂O₃ powder on the degradation of the MmNi_3.9Co_0.6Mn_0.3Al_0.2 electrode were examined. The addition of the Y₂O₃ and Co nano powder significantly improved the performance of the MH electrode by increasing the cycle life and initial activation rate.     

Physicochemical and retrogradation properties of modified chestnut starches

Food Science and Biotechnology - Physicochemical properties of acetylated (AC), cross-linked (CL), and hydroxypropylated (HP) chestnut starches were investigated. Modified chestnut starch showed...     

Catalysts characteristics of Ni/YSZ core-shell according to plating conditions using electroless plating

This study aims to develop an anode catalyst for a solid oxide fuel cell (SOFC) using electroless nickel plating. We have proposed a new method for electroless plating of Ni metal on yttria-stabilized zirconia (YSZ) particles. We examine the uniformity of the Ni layer on the plated core-shell powder, in addition to the content of Ni and the reproducibility of the plating. We have also evaluated the carbon deposition rate and characteristics of the SOFC anode catalyst. To synthesize Ni-plated YSZ particles, the plated powder is heat-treated at 1200 °C. The resultant particles, which have an average size of 50 μm, were subsequently used in the experiment. The size of the Ni particles and the Ni content both increase with increasing plating temperature and plating time. The X-ray diffraction pattern reveals the growth of Ni particles. After heat-treatment, Ni is oxidized to NiO, leading to the co-existence of Ni and NiO; Ni₃P is also observed due to the presence of phosphorous in the plating solution. Following heat treatment for 1 h at 1200 °C, Ni is mostly oxidized to NiO. The carbon deposition rate of the reference YSZ powder is ~135%, while that of the Ni-plated YSZ is 1%-6%.     

High performance of a solid-state flexible asymmetric supercapacitor based on graphene films

Solid-state flexible energy storage devices hold the key to realizing portable and flexible electronic devices. Achieving fully flexible energy storage devices requires that all of the essential components (i.e., electrodes, separator, and electrolyte) with specific electrochemical and interfacial properties are integrated into a single solid-state and mechanically flexible unit. In this study, we describe the fabrication of solid-state flexible asymmetric supercapacitors based on an ionic liquid functionalized-chemically modified graphene (IL-CMG) film (as the negative electrode) and a hydrous RuO(2)-IL-CMG composite film (as the positive electrode), separated with polyvinyl alcohol-H(2)SO(4) electrolyte. The highly ordered macroscopic layer structures of these films arising through direct flow self-assembly make them simultaneously excellent electrical conductors and mechanical supports, allowing them to serve as flexible electrodes and current collectors in supercapacitor devices. Our asymmetric supercapacitors have been optimized with a maximum cell voltage up to 1.8 V and deliver a high energy density (19.7 W h kg(-1)) and power density (6.8 kW g(-1)), higher than those of symmetric supercapacitors based on IL-CMG films. They can operate even under an extremely high rate of 10 A g(-1) with 79.4% retention of specific capacitance. Their superior flexibility and cycling stability are evident in their good performance stability over 2000 cycles under harsh mechanical conditions including twisted and bent states. These solid-state flexible asymmetric supercapacitors with their simple cell configuration could offer new design and fabrication opportunities for flexible energy storage devices that can combine high energy and power densities, high rate capability, and long-term cycling stability.     

Effects of rice bran fiber on heat-induced gel prepared with pork salt-soluble meat proteins in model system

The technological effects of rice bran fiber on pork salt-soluble meat proteins in a model system were investigated. Rice bran fiber at levels of 0% (control), 0.1%, 0.5%, 1%, and 2% was added at the same time as salt-soluble meat protein to maintain similar moisture levels in all samples. Samples with increasing amounts of added rice bran fiber had higher pH, yellowness, sarcoplasmic and total protein solubilities. The moisture content, myofibrillar protein solubility and water holding capacity were the highest in the treatments containing with 1% rice bran fiber. However, the lightness and redness, textural properties decreased with increasing rice bran fiber levels. SDS gel electrophoresis did not reveal any changes in proteins regardless different rice bran fiber levels. The apparent viscosity indicated that improvements in water holding capacity and decreased texture due to added rice bran fiber.