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Rouvie A. Carpentier D. Lagay N. Decobert J. Pommereau F. Achouche M. 《Photonics Technology Letters, IEEE》2008,20(6):455-457
This letter demonstrates a planar junction GalnAs-AlInAs avalanche photodiode using back-side illumination through thinned InP substrate covered with chemical vapor deposition SiNx antireflection coating. The combined properties of very low dark current (I dark(M = 0) = 17 nA), low excess noise factor (f(M = 10) = 3.5), and high gain x bandwidth product over 140 GHz were simultaneously achieved with a high primary responsivity of 0.95 A/W at 1.55 mum. 相似文献
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