高温退火对反应溅射制备的a-SiC:H薄膜结构的影响

通过红外透射谱、拉曼散射谱和X射线衍射谱的测量,研究了反应溅射制备的氢化非晶硅碳膜（SP-a-SiC：H）高温退人处理后的结构变化。发现在等时退火的情况下,退火温度对薄膜结构影响明显,H原子的逸出温度与键合有关,H从CH_n中逸出要比从SiH_n键中追出需要更高的温度,样品经800℃退火后,a－SiC：H膜转化为μc－SiC膜     

Photocurrent Measurement of Si1-xGex/SiMultiple Quantum Wells With Ion Implantation and Thermal Annealing

Si-Ge interdiffusion in Si1-xGex/Si multiple quantum-wells (MQW) is investigated by photocurrent spectroscopy, which is induced by ion implantation of Si+ and thermal annealing. The band gap energy of the Si1-xGex/Si samples implanted plus annealed has a blue shift up to 97meV compared to the annealed-only samples. The blue shift may be caused by the SiGe interdiffusion and the relaxation of the SiGe quantum wells.